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Characterization of Films Sputtered with the Cu-Ga Target Prepared by the Cold Spray Process
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 Title & Authors
Characterization of Films Sputtered with the Cu-Ga Target Prepared by the Cold Spray Process
Cho, Youngji; Yoo, Jung Ho; Yang, Jun-Mo; Park, Dong-Yong; Kim, Jong-Kyun; Choi, Gang-Bo; Chang, Jiho;
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 Abstract
The microstructural properties and electrical characteristics of sputtering films deposited with a Cu-Ga target are analyzed. The Cu-Ga target is prepared using the cold spray process and shows generally uniform composition distributions, as suggested by secondary ion mass spectrometer (SIMS) data. Characteristics of the sputtered Cu-Ga films are investigated at three positions (top, center and bottom) of the Cu-Ga target by X-ray diffraction (XRD), SIMS, 4-point probe and transmission electron microscopy (TEM) analysis methods. The results show that the Cu-Ga films are composed of hexagonal and unknown phases, and they have similar distributions of composition and resistivity at the top, center, and bottom regions of the Cu-Ga target. It demonstrates that these films have uniform properties regardless of the position on the Cu-Ga target. In conclusion, the cold spray process is expected to be a useful method for preparing sputter targets.
 Keywords
Solar cell;CIGS;Cu-Ga sputtering target;Cold spray process;Characterization;
 Language
Korean
 Cited by
 References
1.
K. Ramanathan, M. A. Contreras, C. L. Perkins, S. Asher, Falah S. Hasoon, J. Keane, D. Young, M. Romero, W. Metzger, R. Noufi, J. Ward and Anna Duda: Prog. Photovolt: Res. Appl., 11 (2003) 225.

2.
P. Jackson, D. Hariskos, E. Lotter, S. Paetel, R. Wuerz, R. Menner, W. Wischmann and M. Powalla: Prog. Photovolt: Res. Appl., 19 (2011) 894.

3.
S. Jung, S. Ahn, J. H. Yun, J. Gwak, D. Kim and K. Yoon: Current Applied Physics, 10 (2010) 990.

4.
C. Yuh Su, W.-H. Ho, H.-C. Lin, C.-Y Nieh and S.-C. Liang: Sol. Energy Mater. Sol. Cells, 95 (2011) 261.

5.
H. Araki, Y. Kubo, A. Mikaduki, K. Jimbo, W. S. Maw, H. Katagiri, M. Yamazaki, K. Oishi and A. Takeuchi: Sol. Energy Mater. Sol. Cells, 93 (2009) 996.

6.
I. H. Choi and D. H. Lee: Thin Solid Films, 515 (2007) 4778.

7.
V. Probst, W. Stetter, W. Riedl, H. Vogt, M. Wendl, H. Calwer, S. Zweigart, K. D. Ufert, B. Freienstein, H. Cerva and F. H. Karg: Thin Solid Films, 387 (2001) 262.

8.
S. Marx, A. Paul, A. Kohler and G. Huttl: J. Therm. Spray Techn., 15 (2006) 177.

9.
S. Hong and C. Suryanarayana: J. Appl. Phys., 96 (2004) 6120.