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Transverse Wave Propagation in [ab0] Direction of Silicon Single Crystal
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Transverse Wave Propagation in [ab0] Direction of Silicon Single Crystal
Yun, Sangjin; Kim, Hye-Jeong; Kwon, Seho; Kim, Young H.;
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The speed and oscillation directions of elastic waves propagating in the [ab0] direction of a silicon single crystal were obtained by solving Christoffel`s equation. It was found that the quasi waves propagate in the off-principal axis, and hence, the directions of the phase and group velocities are not the same. The maximum deviation of the two directions was . Two modes of the pure transverse waves propagate in the [110] direction with different speeds, and hence, two peaks were observed in the pulse echo signal. The amplitude ratio of the two peaks was dependent on the initial oscillating direction of the incident wave. The pure and quasi-transverse waves propagate in the [210] direction, and the oscillation directions of these waves are perpendicular to each other. The skewing angle of the quasi wave was calculated as , and it was measured as . The amplitude decomposition in the [210] direction was similar to that in the [110] direction, since the oscillation directions of these waves are perpendicular to each other. These results offer useful information in measuring the crystal orientation of the silicon single crystal.
Silicon Single Crystal;Transverse Wave;Polarization;Skewing;
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대구경 선집속 초음파 탐촉자를 이용한 실리콘 판재의 결정방향 측정,오재원;정인영;한규범;김동현;김영환;

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