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The Fabrication and Property Evaluation of Poly-crystalline CdTe based Photon Counting X-ray Sensor
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 Title & Authors
The Fabrication and Property Evaluation of Poly-crystalline CdTe based Photon Counting X-ray Sensor
Kang, Sang Sik; Park, Ji Koon;
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 Abstract
An electrical signals of a conventional radiation medical imaging sensor are obtained by charge integration method. In this study, the polycrystalline cadmium telluride(p-CdTe) film was fabricated by a thermal evaporation method for the photon counting sensor development with excellent resolution in low exposure dose. From the fabricated p-CdTe sensor, the physical properties(SEM, XRD) and the electrical properties(leakage current, x-ray sensitivity, SNR) were evaluated. As a result, the leakage current of below and of the X-ray sensitivity were showed in below . In addition, the signal to noise ratio showed the values of above 5000 at operating voltage.
 Keywords
photon counting;polycrystalline;cadmium telluride;charge collection efficiency;thermal evaporation;
 Language
Korean
 Cited by
 References
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