The Fabrication and Property Evaluation of Poly-crystalline CdTe based Photon Counting X-ray Sensor

Title & Authors
The Fabrication and Property Evaluation of Poly-crystalline CdTe based Photon Counting X-ray Sensor
Kang, Sang Sik; Park, Ji Koon;

Abstract
An electrical signals of a conventional radiation medical imaging sensor are obtained by charge integration method. In this study, the polycrystalline cadmium telluride(p-CdTe) film was fabricated by a thermal evaporation method for the photon counting sensor development with excellent resolution in low exposure dose. From the fabricated p-CdTe sensor, the physical properties(SEM, XRD) and the electrical properties(leakage current, x-ray sensitivity, SNR) were evaluated. As a result, the leakage current of below $\small{5nA/cm^2}$ and $\small{7{\mu}C/cm^2-R}$ of the X-ray sensitivity were showed in below $\small{1V/{\mu}m}$. In addition, the signal to noise ratio showed the values of above 5000 at operating voltage.
Keywords
photon counting;polycrystalline;cadmium telluride;charge collection efficiency;thermal evaporation;
Language
Korean
Cited by
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