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Design, Fabricaiton and Testing of a Piezoresistive Cantilever-Beam Microaccelerometer for Automotive Airbag Applications
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 Title & Authors
Design, Fabricaiton and Testing of a Piezoresistive Cantilever-Beam Microaccelerometer for Automotive Airbag Applications
Ko, Jong-Soo; Cho, Young-Ho; Kwak, Byung-Man; Park, Kwan-Hum;
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 Abstract
A self-diagnostic, air-damped, piezoresitive, cantilever-beam microaccelerometer has been designed, fabricated and tested for applications to automotive electronic airbag systems. A skew-symmetric proof-mass has been designed for self-diagnostic capability and zero transverse sensitivity. Two kinds of multi-step anisotropic etching processes are developed for beam thickness control and fillet-rounding formation, UV-curing paste has been used for sillicon-to-glass bounding. The resonant frequency of 2.07kHz has been measured from the fabricated devices. The sensitivity of 195 /g is obtained with a nonlinearity of 4% over 50g ranges. Flat amplitude response and frequency-proportional phase response have been obserbed, It is shown that the design and fabricaiton methods developed in the present study yield a simple, practical and effective mean for improving the performance, reliability as well as the reproducibility of the accelerometers.
 Keywords
Micromachining;Silicon Accelerometer;Air-bag;Cross-Axis Sensitivity;Skew-Symmetric Proof-Mass;Piezoresistive Detection;Self-Diganosis;Air-Damping;Multi-Step Anisotropic Etch;Fillet-Rounding Formation;
 Language
Korean
 Cited by
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대한기계학회논문집A, 2001. vol.25. 1, pp.11-15 crossref(new window)
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표면미세가공기술을 이용한 수평감지방식의 정전용량형 다결정 실리콘 가속도계의 설계, 제작 및 가공 오차 영향 분석,김종팔;한기호;조영호;

대한기계학회논문집A, 2001. vol.25. 3, pp.529-536 crossref(new window)
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