Design, Fabrication and tTsting of a Microswitch Using Snap-through Buckling Phenomenon

Title & Authors
Design, Fabrication and tTsting of a Microswitch Using Snap-through Buckling Phenomenon
Go, Jeung-Sang; Cho, Young-Ho; Kwak, Byung-Man; Park, Kwan-Hum;

Abstract
A snapping-beam microswitch has been designed, fabricated and tested. From a design analysis, necessary and sufficient conditions for a snap-through switching fouction have been derived for a clamped shallow beam. The necessary condition has resulted in a geometric relation, in which the ratio of beam thickness to initial beam deflection plays a key role in the snapping ability. The sufficient condition for the snapping action has been obtained as a function of the inertia force due to applied acceleration, and the electrostatic force, adjustable by an inter-electrode voltage. For experimental investigations, a set of microbeams of silicon dioxide/$\small{P^+}$silicon bimorphs have been fabricated. Geometric size and mechanical behavior of each material film have been measured from on-chip test structures. Estimated and measured characteristics of the fabricated devices are compared.
Keywords
Micromachining;Microswitch;Snapthrough Buckling;Acceleration Switch;Micromaterials;Blister Test;
Language
Korean
Cited by
1.
4 중 안정성 일체형 메커니즘의 설계, 해석 및 제작,한정삼;

대한기계학회논문집A, 2007. vol.31. 5, pp.617-624
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