Publisher : The Korean Society of Mechanical Engineers
DOI : 10.22634/KSME-A.19126.96.36.1994
Title & Authors
Development of a Noncontacting 6 DOF Micro-Postioner Driven by Magnetic Force-Design, Modeling and Control- Choi, Kee-Bong; Park, Kyi-Hwan; Kim, Soo-Hyun; Kwak, Yoon-Keun;
A magnetically levitated micro-positioner is implemented to avoid mechanical friction and increase precision. Since magnetic levitation system is inherently unstable, most concern is focused on a magnetic circuit design to increase the system dynamic stability. For this, the proposed levitation system is constructed by using an antagonistic structure which permits a simple design and robust stability. From the dynamic equations of motion, it is verified that the proposed magnetically levitated system is decoupled in 6 degree-of-freedom motion. Experimental results are presented in terms of time response and accuracy.
Magnetic Levitation;Antagonistic Structure;Permanent Magnet;Air-Core Solenoid;Moving-Magenet Type Manipulator;