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Development of a Noncontacting 6 DOF Micro-Postioner Driven by Magnetic Force-Design, Modeling and Control-
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 Title & Authors
Development of a Noncontacting 6 DOF Micro-Postioner Driven by Magnetic Force-Design, Modeling and Control-
Choi, Kee-Bong; Park, Kyi-Hwan; Kim, Soo-Hyun; Kwak, Yoon-Keun;
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 Abstract
A magnetically levitated micro-positioner is implemented to avoid mechanical friction and increase precision. Since magnetic levitation system is inherently unstable, most concern is focused on a magnetic circuit design to increase the system dynamic stability. For this, the proposed levitation system is constructed by using an antagonistic structure which permits a simple design and robust stability. From the dynamic equations of motion, it is verified that the proposed magnetically levitated system is decoupled in 6 degree-of-freedom motion. Experimental results are presented in terms of time response and accuracy.
 Keywords
Magnetic Levitation;Antagonistic Structure;Permanent Magnet;Air-Core Solenoid;Moving-Magenet Type Manipulator;
 Language
Korean
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