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Polishing of Ultra-Clean Internal Surface Using Magnetic Force
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 Title & Authors
Polishing of Ultra-Clean Internal Surface Using Magnetic Force
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Recently, the technology for internal polishing is needed for ultra-clean machining for the prevention of corrosion and pollution of parts is the area of high technology industries such as semiconductor, electronics, telecommunication optics, aerospace, and motors. In this study, an internal polishing system using the magnetic force was developed for the production of ultra-clean tubes with averaged surface roughness ranging from 0.2㎛ to 0.05㎛ or less, and magnetic abrasives composed of WC/Co powder were developed, After finding the optimal condition on each, machining characteristics using newly developed abrasive were analyzed. Form the results obtained by experimental design method, the optimal polishing condition was analyzed and, thhereafter internal polishing was done.
Internal Polishing(내면연마가공);Magnetic Abrasive(자기입자);Surface Roughness(표면조도);Magnetic Force(자력);
 Cited by
사파이어 웨이퍼의 기계-화학적인 연마 가공특성에 관한 연구,신귀수;황성원;서남섭;김근주;

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