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Electromagnetic Microactuators with the Electroplated Planar Coil Driven by Radial Magnetic Field
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 Title & Authors
Electromagnetic Microactuators with the Electroplated Planar Coil Driven by Radial Magnetic Field
Ryu, Ji-Cheol; Gang, Tae-Gu; Jo, Yeong-Ho;
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 Abstract
This paper presents an electromagnetic microactuator using the copper coil electroplated on the p+silicon diaphragm. The microactuator generates a vertical motion of the diaphragm using the radial direction, we propose a new actuator structure with twin magnets. The microactuator field in the radial direction, we propose a new actuator structure with twin magnets. The microactator shows a values of resonant frequency and quality factor in the ranges of 10.510.22kHz and 46.63.3, respectively. The twin magnet microactuator generates the maximum peak-to-peak amplitude of 4.4 for the AC rms current of 26.8mA, showing 2.4 times larger amplitude than the single magnet microactuator.
 Keywords
Electromagnetic Microactuator;Radial Magnetic Field;Twin Magnets;Electroplating;
 Language
Korean
 Cited by
 References
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