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Laterally-Driven Electrostatic Repulsive-Force Microactuator
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 Title & Authors
Laterally-Driven Electrostatic Repulsive-Force Microactuator
Lee, Gi-Bang; Jo, Yeong-Ho;
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We present a new electrostatic repulsive-force microactuator using a lateral repulsive force induced by an asymmetric distribution of electrostatic field. The lateral repulsive force has been characterized by a simple analytical equation, derived from a finite element simulation. A set of repulsive force polysilicon microactuators has been designed and fabricated by a 4-mask surface-micromachining process. Static and dynamic micromechanical behavior of the fabricated microactuators has been measured at the atmospheric pressure for a varying bias voltage. The static displacement of the fabricated microactuator, proportional to the square of the DC bias voltage, is obtained as 1.27 for the DC bias voltage of 140V. The resonant frequency of the repulsive-force microactuator increases from 11.7 kHz to 12.7 kHz when the DC bias voltage increases from 60V to 140V. The measured quality-factor varies from 12 to 13 for the bias volatge range of 60V∼140V. The characteristics of the electrostatic repulsive-force have been discussed and compared and compared with those of the conventional electrostatic attractive-force.
Repulsive-Force;Electrostatic Force;Microactuator;Frequency-Tuning;Quality-Factor;
 Cited by
센서화된 초탄성 마이크로그리퍼의 설계, 제작 및 성능평가,김덕호;김병규;강현재;김상민;

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