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A Study on the Optimal Design, Modeling and Control of the Multi d.o.f Precision Positioning System Using Magnetic Levitation Actuating Principle
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 Title & Authors
A Study on the Optimal Design, Modeling and Control of the Multi d.o.f Precision Positioning System Using Magnetic Levitation Actuating Principle
Jeong, Gwang-Seok; Baek, Yun-Su;
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The multi degree of freedom system using magnetic levitation has been implemented successfully. Differently from another noncontact systems, the developed system was focused on the maximization of the system stiffness under the constraint of a limited input. The variation of a relative adopting point between the magnetic pair, its location on the fixed base, and the selection of optimal specifications for the main active magnetic elements give us another chance to realize the increased robustness against external disturbances with the less control inputs. In this paper, the overall development procedures are given including the optimal design, the dynamic modeling, the various control tests, and the main issues to be solved.
Magnetic Levitation;Narrow Gap Principles;Optimization;Magnetic Field;Linear Perturbation Method;
 Cited by
1985, 'An Electromagnetic Microscopic Positioning Device for the Scanning Tunneling Microscope,' J. of Apply Physics, Vol. 58, No. 11, pp. 3947-3953 crossref(new window)

Smith, D. P.and Elrod, S. A,, 1985, 'Magnetically Driven Micropositioners,' Rev. Sci. Instrum, Vol. 56, No. 10, pp. 1970-1971 crossref(new window)

Jeong, M. C. and busch-Vishiniac, I. J., 1991, 'A Submicron Accuracy Magnetic Levitation Micromachine with Endpoint Friction,' Sensors and Actuators, Vol. 29, pp. 225-234 crossref(new window)

Bleuler, H. and Visher, D., 1994, 'New Concept for Cost-Effective Magnetic Bearing Control,' Automatica, Vol. 30, No. 5, pp. 871-876 crossref(new window)

Tsukamoto, O. and Chen, J. Z., 1988, 'A New Magnetic Levitation System with AC Magnets,' IEEE Tranc. on Magnetics, Vol. 24, No. 2, pp. 1497-1500 crossref(new window)

Kim, W. J. and Trunper, D. L., 1998, 'High Precision Magnetic Levitation Stage for Photolithography,' Precision Engineering, vol. 24, No. 2, pp. 66-77 crossref(new window)

Steve Chen, S. J. and Busch-Vishiniac, I. J., 1995, 'A Magnetically Levitated, Automated, Contact Analytical Probe Tool,' IEEE Trans. on Semicondutor Manufacturing, Vol. 8, No. 1, pp. 72-78 crossref(new window)

Hoolis, R. L. and Saclcudean, S. E., 1993, 'Lorentz Levitation Technology: A New Approach Fine Motion Robotics, teleoperation, Haptic interface, and Vibration Isolation,' 5th Inter. Symp. on Robotics Research, Pennsylvania, The U.S.A., Oct

정광석, 백윤수, 2000, '자기 부상 방식 미세 운동 기구의 동적 모델링,' 대한기계학회논문집, 제 24 권, 제 5 호, pp. 1166-1174

Vernon, D. Barger, 1987, Classical Electricity and Magnetism, Massachusetts : Allyn and Bacon