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Analysis on particle deposition onto a heated, horizontal free-standing wafer with electrostatic effect
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 Title & Authors
Analysis on particle deposition onto a heated, horizontal free-standing wafer with electrostatic effect
Yoo, Kyung-Hoon; Oh, Myung-Do; Myong, Hyon-Kook;
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 Abstract
The electrostatic effect on particle deposition onto a heated, Horizontal free-standing wafer surface was investigated numerically. The deposition mechanisms considered were convection, Brownian and turbulent diffusion, sedimentation, thermophoresis and electrostatic force. The electric charge on particle needed to calculate the electrostatic migration velocity induced by the local electric field was assumed to be the Boltzmann equilibrium charge. The electrostatic forces acted upon the particle included the Coulombic, image, dielectrophoretic and dipole-dipole forces based on the assumption that the particle and wafer surface are conducting. The electric potential distribution needed to calculate the local electric field around the wafer was calculated from the Laplace equation. The averaged and local deposition velocities were obtained for a temperature difference of 0-10 K and an applied voltage of 0-1000 v.The numerical results were then compared with those of the present suggested approximate model and the available experimental data. The comparison showed relatively good agreement between them.
 Keywords
Horizontal Freestanding Wafer;Deposition Velocity;Brownian and Turbulent Diffusion;Sedimentation;Thermophoresis;Electrostatic Force;Boltzman Equilibrium Charge;
 Language
Korean
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