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Investigation of the Performance Characteristics of an In-Situ Particle Monitor at Low Pressures Using Aerodynamic Lenses
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 Title & Authors
Investigation of the Performance Characteristics of an In-Situ Particle Monitor at Low Pressures Using Aerodynamic Lenses
Bae, Gwi-Nam;
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 Abstract
In-situ particle monitors(ISPMs) are widely used for monitoring contaminant particles in vacuum-based semiconductor manufacturing equipment. In the present research, the performance of a Particle Measuring Systems(PMS) Vaculaz-2 ISPM at low pressures has been studied. We generated the uniform sized methylene blue particle beams using three identical aerodynamic lenses in the center of the vacuum line, and measured the detection efficiency of the ISPM. The effects of particle size, particle concentration, mass flow rate, system pressure, and arrangement of aerodynamic lenses on the detection efficiency of the ISPM were examined. Results show that the detection efficiency of the ISPM greatly depends on the mass flow rate, and the particle Stokes number. We also found that the optimum Stokes number ranges from 0.4 to 1.9 for the experimental conditions.
 Keywords
In-Situ Particle Monitor;Particle Beam;Aerodynamic Lens;Low Pressure;Detection Efficiency;
 Language
Korean
 Cited by
 References
1.
Takahashi, K. M., and Daugherty, J. E., 1996, 'Current Capabilities and Limitations of In Situ Particle Monitors in Silicon Processing Equipment,' Journal of Vacuum Science and Technology(A), Vol. 14, pp. 2983-2993 crossref(new window)

2.
Caldow, R., Pui, D. Y. H., Szymanski, W. W., and Liu, B. Y. H., 1990, 'Performance of the High Yield Technology Inc. PM-100 In Situ Particle Flux Monitor,' Aerosol Science and Technology, Vol. 12, pp. 981-991 crossref(new window)

3.
Jin, X, 1995, Sampling and Measuring of Particles in a PECVD Reactor for Semiconductor Film Deposition, Ph.D Thesis, Department of Mechanical Engineering, University of Minnesota, MN, U.S.A.

4.
Liu, B. Y. H, and Jin, X., 1997, 'Real-Time Particle Monitoring in a Plasma-Enhanced Chemical Vapor Deposition System,' In Proceedings of the IES 43rd Annual Technical Meetings, Institute of Environmental Sciences, Los Angeles, California, May 4-8, pp. 34-42

5.
Liu, P., Rao, N. P., Kittelson, D. B., and McMurry, P. H., 1996, 'Optimizing the Detection Efficiency of a Low Pressure, In-Situ Particle Monitor Using Aerodynamic Focusing Lenses,' In Proceedings of the IES 42nd Annual Technical Meetings, Institute of Environmental Sciences, Orlando, Florida, May 12-16, pp. 217-224

6.
배귀남, 1998, '감압상태에서 In-Situ Particle Monitor의 성능특성', 대한기계학회논문집 B권, 제22권, 제11호, pp. 1564-1570

7.
Kinney, P. D., Bae, G. N., Pui, D. Y. H., and Liu, B. Y. H., 1996, 'Particle Behavior in Vacuum Systems: Implications for In-Situ Particle Monitoring in Semiconductor Processing Equipment,' Journal of the Institute of the Environmental Sciences, Nov./Dec, pp. 40-45

8.
Bae, G. N., Kinney, P. D., Liu, B. Y. H., and Pui, D. Y. H., 1998, 'Investigation of Aerosol Spatial Distributions Downstream of a Critical Orifice at Low Pressure,' Aerosol Science and Technology, Vol. 28, No. 6, pp. 479-488 crossref(new window)

9.
안진홍, 안강호, 1999, '임계 요리피스를 통과한 입자의 운동특성과 입자 빔에 관한 수치적 연구', 대한기계학회논문집 B권, 제23권, 제10호, pp. 1240-1247

10.
Sato, S., Chen, D. R., and Pui, D. Y. H., 1999, 'Particle Behavior at Low Pressure: Particle Deposition in a Tube with an Orifice,' In Proceeding of the First Asia Aerosol Conference, Nagoya, Japan, July 27-29, pp. 352-353

11.
Dahneke, B. E., and Cheng, Y. S., 1979, 'Properties of Continuum Source Particle Beams. I. Calculation Methods and Results,' Journal of Aerosol Science, Vol. 10, pp. 257-274 crossref(new window)

12.
Fernandez de la Mora, J., Rao, N. P., and McMurry, P. H., 1990, 'Inertial Impaction of Fine Particles at Moderate Reynolds Numbers and in the Transonic Regime with a Thin-Plate Orifice Nozzle,' Journal of Aerosol Science, Vol. 21, pp. 889-909 crossref(new window)

13.
Rao, N. P., Navascues, J., and Fernandez de la Mora, J., 1993, 'Aerodynamic Focusing of Particles in Viscous Jets,' Journal of Aerosol Science, Vol. 24, No. 7, pp. 879-892 crossref(new window)

14.
Liu, P., Ziemann, P. J., Kittelson, D. B., and McMurry, P. H., 1995, 'Generating Particle Beams of Controlled Dimensions and Divergence: I. Theory of Particle Motion in Aerodynamic Lenses and Nozzle Expansions,' Aerosol Science and Technology, Vol. 22, pp. 293-313 crossref(new window)

15.
Liu, P., Ziemann, P. J., Kittelson, D. B., and McMurry, P. H., 1995, 'Generating Particle Beams of Controlled Dimensions and Divergence: II. Experimental Evaluation of Particle Motion in Aerodynamic Lenses and Nozzle Expansions,' Aerosol Science and Technology, Vol, 22, pp. 314-324 crossref(new window)

16.
배귀남, 1999, '저압상태에서 공기역학적 렌즈를 이용한 입자 빔의 생생 및 크기 제어', 대한기계학회논문집 B권, 제23권, 제10호, pp. 1320-1326

17.
Szymanski, W. W, and Liu, B. Y. H., 1986, 'On the Sizing Accuracy of Laser Optical Particle Counters,' Particle Characterization, Vol. 3, pp. 1-7 crossref(new window)

18.
안강호, 김남효, 이종호, 배귀남, 1996, 'Differential Mobility Analyzer(DMA) 내의 입자운동 특성 분석', 제20권, 제6호, pp. 2005-2013

19.
Particle Measuring Systems, Vaculaz-2, -3, -4(Monitor) Operator's Manual, Boulder, Colorado, U.S.A.