JOURNAL BROWSE
Search
Advanced SearchSearch Tips
Model for the Inertial Focusing of Particles Using an Atmospheric Aerodynamic Lens
facebook(new window)  Pirnt(new window) E-mail(new window) Excel Download
 Title & Authors
Model for the Inertial Focusing of Particles Using an Atmospheric Aerodynamic Lens
Lee, Jin-Won; Lee, Min-Yeong;
  PDF(new window)
 Abstract
Aerodynamic lenses are widely used in generating particle beams of high density and small diameter, but analytical or modeling studies are limited only in the free molecular regime. In this study, it is shown that generating particle beam is also possible in atmospheric pressure range, and the mechanism of generating particle beam using an orifice is analysed into three different parts : fluid dynamic contraction, diffusional defocusing, and inertial focusing. In laminar flow conditions, the diffusional defocusing effect can be neglected, and the effects of inertial focusing can be expressed in terms of the orifice size and Stokes number. Numerical experiments are done for two different orifices, d/D=1/5 and 1/10 and particle diameter d(sub)p=1-10 ㎛. The results for two different orifices can be made into a single curve when a modified Stokes number is used. The inertial focusing effect diminishes when the modified Stokes number becomes smaller than 10(sup)-2.
 Keywords
Aerodynamic Lens;Orifice;Particle Beam;Particle Focusing;Inertial Focusing;
 Language
Korean
 Cited by
 References
1.
Murphy, W. K. and Sears, G. W., 1964, 'Production of Particulate Beams,' J. Appl. Phys., Vol. 35, pp. 1986-1987 crossref(new window)

2.
Liu, P., Ziemann, P. J., Kittelson, D. B., and McMurry, P. H., 1995, 'Generating Particle Beams of Controlled Dimensions and Divergence : I. Theory of Particle Motion in Aerodynamic Lenses and Nozzle Expansions,' Aerosol Science and Technology, Vol. 22, pp. 293-313

3.
Liu, P., Ziemann, P. J., Kittelson, D. B., and McMurry, P. H., 1995, 'Generating Particle Beams of Controlled Dimensions and Divergence : II. Experimental Evaluation of Particle Motion in Aerodynamic Lenses and Nozzle Expansions,' Aerosol Science and Technology, Vol. 22, pp. 314-324 crossref(new window)

4.
Kinney, P. D., Bae, G. N., Pui, D. Y. H., and Liu, B. Y. H., 1996, 'Particle Behavior in Vacuum Systems : Implications for In-Situ Particle Monitoring in Semiconductor Processing Equipment,' Journal of the Institute of Environmental Sciences, Nov/Dec., pp. 40-45

5.
Bae, G. N., Kinney, P. D., Liu, B. Y. H. and Pui, D. Y. H., 1998, 'Investigation of Aerosol Spatial Distributions Downstream of a Critical Orifice at Low Pressure,' Aerosol Science and Technology, Vol. 28., No.6, pp. 479-488 crossref(new window)

6.
Schreiner, J., Voigt, C., Mauersberger, K., McMurry, P., and Ziemann, P., 1998, 'Aerodynamic Lens System for Producing Particle Beams at Stratospheric Pressures,' Aerosol Science and Technology, Vol. 29, pp. 50-56 crossref(new window)

7.
배귀남, 1999, '저압상태에서 공기역학적 렌즈를 이용한 입자 빔의 생성 및 크기 제어,' 대한기계학회논문집 B권, 제23권 제10호, pp. 1320-1326

8.
안진홍, 안강호, 1999, '임계 오리피스를 통과한 입자의 운동특성과 입자 빔에 관한 수치적 연구,' 대한기계학회논문집 B권, 제23권 제10호, pp. 1240-1247

9.
Liu, P.,Rao, N.P., Kittelson, D.B. and McMurry, P .H., 1996, 'Optimizing the Detection Efficiency of a Low Pressure, In-Situ Particle Monitor Using Aerodynamic Focusing Lenses,' Annual technical meeting- Institute of Environmental Sciences, Vol. 42, p. 217

10.
Hinds, W. C., 1982, Aerosol Technology, John Wiley & Sons

11.
Riley, J. J., 1971, Ph.D. Thesis, The Johns Hopkins Univ. Baltimore, MD

12.
Clift R., Grace J. R. and Weber M. E. 1978, Bubbles, Drops and Particles, Academic Press, New York