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Characteristics of Ultrafine SiOParticle Synthesized by Electro-Hydrodynamic Spray Injection in a Furnace
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 Title & Authors
Characteristics of Ultrafine SiOParticle Synthesized by Electro-Hydrodynamic Spray Injection in a Furnace
Yun, Jin-Uk; Yang, Tae-Hun; An, Gang-Ho; Choe, Man-Su;
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 Abstract
Ultrafine particles have been widely used in many high technology industrial areas. The spherical nonagglomerated and uniform nanometer-size SiOparticles are synthesized by the direct injection of TEOS(Tetraethyorthosilicate) using electro-hydrodynamic spraying method. Electro-hydrodynamic spraying can generate submicron-size TEOS droplets having high electric charges by applying a high electric field between the liquid injection nozzle and the reaction tube. These TEOS droplets are evaporated, and thermally decomposed or oxidized to produce nanometresized SiOparticles in the reaction tube. Spherical, nonagglomerated and ultrafine particles are generated in various conditions and examined by using SEM and SMPS. As the total gas flow rate in the furnace changes from 1.5 lpm, the mean diameter of SiOparticle decreases from 120 nm to 68 nm. The synthesized particle charging fractions are also investigated.
 Keywords
Ultrafine SiOParticles;Furnace;Size Distribution;Charging;Agglomeration;
 Language
Korean
 Cited by
1.
대기압 반응로 내 코로나 이온을 이용한 나노입자 형상의 제어,안강호;윤진욱;김영원;

대한기계학회논문집B, 2002. vol.26. 5, pp.710-715 crossref(new window)
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