A Numerical Study on the Anisotropic Thermal Conduction by Phonon Mean Free Path Spectrum of Silicon in Silicon-on-Insulator Transistor

- Journal title : Transactions of the Korean Society of Mechanical Engineers B
- Volume 40, Issue 2, 2016, pp.111-117
- Publisher : The Korean Society of Mechanical Engineers
- DOI : 10.3795/KSME-B.2016.40.2.111

Title & Authors

A Numerical Study on the Anisotropic Thermal Conduction by Phonon Mean Free Path Spectrum of Silicon in Silicon-on-Insulator Transistor

Kang, Hyung-sun; Koh, Young Ha; Jin, Jae Sik;

Kang, Hyung-sun; Koh, Young Ha; Jin, Jae Sik;

Abstract

The primary concern of this research is to examine the phonon mean free path (MFP) spectrum contribution to heat conduction. The size effect of materials is determined by phonon MFP, and the size effect appears when the phonon MFP is similar to or less than the characteristic length of materials. Therefore, knowledge of the phonon MFP is essential to increase or decrease the heat conduction of a material for engineering applications, such as micro/nanosystems. In this study, frequency dependence of the phonon transport is considered using the Boltzmann transport equation based on a full phonon dispersion model. Additionally, the phonon MFP spectrums of in-plane and out-of-plane heat transport are investigated by varying the film thickness of the silicon layer from 41 nm to 177 nm. This will increase the understanding of anisotropic heat conduction in a SOI (Silicon-on-Insulator) transistor.

Keywords

Boltzmann Transport Equation;Dispersion Relation;Phonon Mean Free Path;Thermal Conductivity;

Language

Korean

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