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Characteristics of Disk-type Linear Ultrasonic Motor for Application to x-y Stage
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 Title & Authors
Characteristics of Disk-type Linear Ultrasonic Motor for Application to x-y Stage
Lim Kee-Joe; Park Seong-Bee; Yun Yong-Jin; Lee Kee-Young; Kang Seong-Hwa; Lee Jong-Sub; Jeong Su-Hyun;
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 Abstract
In this paper, a disk-type ultrasonic motor using a combination of radial and bending vibration modes is newly designed and fabricated. The characteristics of the test motor are also measured. By means of traveling elastic wave induced at the surface of circumference of the elastic disk, a steel bar in contact with the surface of circumference of the elastic disk bonded onto the piezoelectric ceramic disks is driven in both directions by changing the sine and cosine voltage inputs. The stator of the motor is composed of two sheets of piezoelectric ceramic disks to bond onto both surfaces of an elastic disk, respectively. As a result, the diameter of the elastic body is increased and the resonant frequency is decreased. The resonant frequency of the stator is about 92 kHz, which is composed with piezoelectric ceramic disks of 28 mm in diameter and 2 mm in thickness, and an elastic body of 32 mm in diameter and 2 mm in thickness. A driving voltage of 20 VPP Produces 200 rpm with a torque of 1Nm and an efficiency of about 10%.
 Keywords
Complex vibration mode;Disk-type linear USM;X-Y stage;
 Language
English
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