Advanced SearchSearch Tips
A Dual-Servo Type VCM for a Nano-Level Measurement System
facebook(new window)  Pirnt(new window) E-mail(new window) Excel Download
 Title & Authors
A Dual-Servo Type VCM for a Nano-Level Measurement System
Yoo, Yong-Min; Kwon, Byung-Il;
  PDF(new window)
In this paper, a dual-servo type VCM (Voice Coil Motor) for the measuring of nano-level displacement and small thrust is proposed and developed. The shape of VCM for improving the resolution of displacement and ensuring a large displacement are presented. The FEM (finite element method) is utilized to analyze the characteristics of VCM that produces linear driving thrust and satisfies the thrust that the measurement system requires. The Prototype is fabricated and an experiment is performed in order to measure displacement. As a result of simulation and testing, the proposed VCM shows the applicable possibility for a nano-level measurement system.
Dual-servo;Finite element analysis;Measurement system;Voice coil motor;
 Cited by
Dual Speed Control Scheme of Servo Drive System for a Nonlinear Friction Compensation, IEEE Transactions on Power Electronics, 2008, 23, 2, 959  crossref(new windwow)
Tosiyuki Shima, Hiroyasu Fujimori, 'An accurate measurement of magnetostriction of thin film by using nano indentation system', IEEE Transactions on magnetics, Vol. 35, No. 5, pp. 3843-3844, 1999

Kenji Uchino, 'Recent trend of piezoelectric actuator developments', IEEE Inter. Symp. On Micromechatronics and Human Science, pp. 3-9, 1999

Shimamoto A, Tanaka K, Development of a depth controlling nanoindention tester with sunnanometer depth and submicro-newton load resolutions', Review of Scientific Instruments, Vol. 68, No. 9, 1997

J. H. Park, S. H. Lee, Y. S. Baek, 'Mechanism Design of Optical Pickup Actuator for Fast Access of Optical Disk Drive', Journal of the Korean Society of Precision Engineering, Vol. 19, No. 12, pp. 109-119, 2002

Masahito Kobayashi and Roberto Horowitz, 'Track Seek Control for Hard Disk Dual-Stage Servo Systems', IEEE Transaction on magnetics, Vol. 37, No. 2, pp. 949-954, 2001 crossref(new window)

J. H. Cho, J. W. Lee, C. K. Lee, B. I. Kwon, 'Optimal Design of Extremely Small Thrust VCM for Nanoindenter', The Transactions of the KIEE, Vol. 53, No. 2, pp. 69-75, 2004

D. H. Kim, S. J. Eum, G. H. Kang, J. P. Hong, G. T. Kim, 'Design and Characteristic Analysis of Moving Coil type Linear Oscillatory Actuator Considering Unbalanced Magnetic Circuit', The Transactions of the KIEE, Vol. 49, No. 6, pp. 403-410, 2000