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Fabrication of Carbon Nanotube Field Emitters
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 Title & Authors
Fabrication of Carbon Nanotube Field Emitters
Yoon, Hyeun-Joong; Jeong, Dae-Jung; Jun, Do-Han; Yang, Sang-Sik;
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This paper presents the fabrication and field emission of carbon nanotube field emitters for a micro mass spectrometer. The carbon nanotube is an adequate material as a field emitter since it has good characteristics. We have successfully fabricated a diode field emitter and a triode field emitter. Each field emitter has been constructed using several micromachining processes and a thermal CVD process. In the case of the diode field emitter, to increase the electric field, the carbon nanotubes are selectively grown on the patterned nickel catalyst layer. The electron current of the diode field emitter is 73.2 when the anode voltage is 1100V. That of the triode field emitter is 3.4 pA when the anode voltage is 1000V.
Carbon nanotube;Field emitter;Ion source;Mass spectrometer;Micromachining;
 Cited by
초소형 질량분석기를 위한 삼극관 구조의 탄소나노튜브 전자방출원,이유리;이기정;;이순일;양상식;

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탄소나노튜브 방출원을 통한 초소형 질량분석기의 이온화 향상,송성호;한규성;;이순일;양상식;

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