Publisher : The Korean Institute of Electrical Engineers
DOI : 10.5370/JEET.2012.7.4.558
Title & Authors
Experiments of a Novel Magnetic Levitation Stage for Wide Area Movements Jeon, Jeong-Woo; Caraiani, Mitica; Oh, Hyeon-Seok; Kim, Sung-Shin;
In this paper, a novel planar type magnetic levitation system without other assistant devices is proposed and it can move with 6 degree of freedom (X, Y, Z, , , ) in wafer size as well as in nano scale positioning.The mover is composed with 2-D Halbach permanent magnet array and the stator is composed with coil arrays.It was composed in laboratory and tested with short stroke (4 [mm]) and long stroke (160 [mm])movements. The errors of short movement test is [X, Y, Z, , , ] [, , , , , ]The errors of long stroke movement test is [X, Y, Z, , , ] [, , , , , ].
Magnetic levitation;Mag-Lev;Magnetic levitation stage;Nano scale positioning;
고정밀 회전 및 축방향 이송을 위한 신개념 원통형 자기부상 스테이지,전정우;;이창린;정연호;김종문;오현석;김성신;
전기학회논문지, 2012. vol.61. 12, pp.1828-1835
A Novel High Precision Electromagnetic Suspension for Long-Stroke Movement and Its Performance Evaluation,Lee, Ki-Chang;Moon, Seokhwan;Ha, Hyunuk;Park, Byoung-Gun;Kim, Ji-Won;Baek, Jun-Young;Lee, Min-Cheol;
Journal of Electrical Engineering and Technology, 2014. vol.9. 2, pp.514-522
Novel Cylindrical Magnetic Levitation Stage for Rotation as well as Translation along Axles with High Precisions, The Transactions of The Korean Institute of Electrical Engineers, 2012, 61, 12, 1828
A Novel High Precision Electromagnetic Suspension for Long-Stroke Movement and Its Performance Evaluation, Journal of Electrical Engineering and Technology, 2014, 9, 2, 514
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