Experiments of a Novel Magnetic Levitation Stage for Wide Area Movements

Title & Authors
Experiments of a Novel Magnetic Levitation Stage for Wide Area Movements
Jeon, Jeong-Woo; Caraiani, Mitica; Oh, Hyeon-Seok; Kim, Sung-Shin;

Abstract
In this paper, a novel planar type magnetic levitation system without other assistant devices is proposed and it can move with 6 degree of freedom (X, Y, Z, $\small{{\theta}_X}$, $\small{{\theta}_Y}$, $\small{{\theta}_Z}$) in wafer size as well as in nano scale positioning.The mover is composed with 2-D Halbach permanent magnet array and the stator is composed with $\small{10{\times}10}$ coil arrays.It was composed in laboratory and tested with short stroke (4 [mm]) and long stroke (160 [mm])movements. The errors of short movement test is [X, Y, Z, $\small{{\theta}_X}$, $\small{{\theta}_Y}$, $\small{{\theta}_Z}$]$\small{{\leq}}$ [$\small{{\pm}200nm}$, $\small{{\pm}200nm}$, $\small{{\pm}250nm}$, $\small{{\pm}3urad}$, $\small{{\pm}2urad}$, $\small{{\pm}1urad}$]The errors of long stroke movement test is [X, Y, Z, $\small{{\theta}_X}$, $\small{{\theta}_Y}$, $\small{{\theta}_Z}$]$\small{{\leq}}$ [$\small{{\pm}200nm}$, $\small{{\pm}200nm}$, $\small{{\pm}250nm}$, $\small{{\pm}1.5urad}$, $\small{{\pm}2urad}$, $\small{{\pm}0.5urad}$].
Keywords
Magnetic levitation;Mag-Lev;Magnetic levitation stage;Nano scale positioning;
Language
English
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