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Experiments of a Novel Magnetic Levitation Stage for Wide Area Movements
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 Title & Authors
Experiments of a Novel Magnetic Levitation Stage for Wide Area Movements
Jeon, Jeong-Woo; Caraiani, Mitica; Oh, Hyeon-Seok; Kim, Sung-Shin;
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 Abstract
In this paper, a novel planar type magnetic levitation system without other assistant devices is proposed and it can move with 6 degree of freedom (X, Y, Z, , , ) in wafer size as well as in nano scale positioning.The mover is composed with 2-D Halbach permanent magnet array and the stator is composed with coil arrays.It was composed in laboratory and tested with short stroke (4 [mm]) and long stroke (160 [mm])movements. The errors of short movement test is [X, Y, Z, , , ] [, , , , , ]The errors of long stroke movement test is [X, Y, Z, , , ] [, , , , , ].
 Keywords
Magnetic levitation;Mag-Lev;Magnetic levitation stage;Nano scale positioning;
 Language
English
 Cited by
1.
고정밀 회전 및 축방향 이송을 위한 신개념 원통형 자기부상 스테이지,전정우;;이창린;정연호;김종문;오현석;김성신;

전기학회논문지, 2012. vol.61. 12, pp.1828-1835 crossref(new window)
2.
A Novel High Precision Electromagnetic Suspension for Long-Stroke Movement and Its Performance Evaluation,;;;;;;;

Journal of Electrical Engineering and Technology, 2014. vol.9. 2, pp.514-522 crossref(new window)
1.
Novel Cylindrical Magnetic Levitation Stage for Rotation as well as Translation along Axles with High Precisions, The Transactions of The Korean Institute of Electrical Engineers, 2012, 61, 12, 1828  crossref(new windwow)
2.
A Novel High Precision Electromagnetic Suspension for Long-Stroke Movement and Its Performance Evaluation, Journal of Electrical Engineering and Technology, 2014, 9, 2, 514  crossref(new windwow)
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