Publisher : The Korean Institute of Electrical Engineers
DOI : 10.5370/JEET.2012.7.4.558
Title & Authors
Experiments of a Novel Magnetic Levitation Stage for Wide Area Movements Jeon, Jeong-Woo; Caraiani, Mitica; Oh, Hyeon-Seok; Kim, Sung-Shin;
In this paper, a novel planar type magnetic levitation system without other assistant devices is proposed and it can move with 6 degree of freedom (X, Y, Z, , , ) in wafer size as well as in nano scale positioning.The mover is composed with 2-D Halbach permanent magnet array and the stator is composed with coil arrays.It was composed in laboratory and tested with short stroke (4 [mm]) and long stroke (160 [mm])movements. The errors of short movement test is [X, Y, Z, , , ] [, , , , , ]The errors of long stroke movement test is [X, Y, Z, , , ] [, , , , , ].
Magnetic levitation;Mag-Lev;Magnetic levitation stage;Nano scale positioning;
Novel Cylindrical Magnetic Levitation Stage for Rotation as well as Translation along Axles with High Precisions, The Transactions of The Korean Institute of Electrical Engineers, 2012, 61, 12, 1828
A Novel High Precision Electromagnetic Suspension for Long-Stroke Movement and Its Performance Evaluation, Journal of Electrical Engineering and Technology, 2014, 9, 2, 514
J. Kim, D. L. Trumper, J. H. Lang, "Modeling and Vector Control of Planar MagneticLevitator," IEEE Trans. On Industry Applications, Vol. 34, No. 6, Nov./Dec., 1998, pp. pp.1254-1262.
X. S. Shan, S. K. Kuo, J. Zhang, and C. H. Menq,"Ultra Precision Motion Control of a Multiple Degrees of Freedom Magnetic Suspension Stage", IEEE/ASME Trans. on Mechatronics, Vol. 7, No. 1, March 2002, pp.67-78.
M.Y.Chen, M.J.Wang, and L.C.Fu, "A Novel dual axis repulsive maglev guiding system with permanent magnet: modeling and controller design", IEEE/ASME Trans. on Mechatronics, Vol. 8, No.1, 2003, pp. 77-86
W.J. Kim, N.Bhat and T. Hu, "Integrated multidimensional positioner for precision manufacturing", Proc. Instn Mech. Engrs Vol. 218 Part B, 2004, pp.431-442.
M. Maggiore and R.Becerril, "Modeling and Control Design for a Magnetic Levitation System", International Journal of Control, vol.77, 2004, no.10, pp.964-977.
J.W.Jeon, M.Caraiani, Y.J.Kim, H.S.Oh, S. S. Kim, "Development of Magnetic Levitated Stage for Wide Area Movements", Proceeding of International Conference on Electrical Machines and Systems, 2007, pp.1486-1491.
M. Caraiani, J. W. Jeon, H. S. Oh, "Modular control system for a magnetic levitated stage", Automation, Quality and Testing, Robotics 2008, Vol. 2, 2008, pp.75-80.