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Structural and Electrical Properties of an Electrolyte-insulator-metal Device with Variations in the Surface Area of the Anodic Aluminum Oxide Template for pH Sensors
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 Title & Authors
Structural and Electrical Properties of an Electrolyte-insulator-metal Device with Variations in the Surface Area of the Anodic Aluminum Oxide Template for pH Sensors
Kim, Yong-Jun; Lee, Sung-Gap; Yeo, Jin-Ho; Jo, Ye-Won;
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 Abstract
In this study, we fabricated an electrolyte-insulator-metal (EIM) device incorporating a high-k Al2O3 sensing membrane using a porous anodic aluminum oxide (AAO) through a two-step anodizing process for pH detection. The structural properties were observed by field-emission scanning electron microscopy (FE-SEM) and X-ray diffraction patterns (XRD). Electrochemical measurements taken consisted of capacitance-voltage (C-V), hysteresis voltage and drift rates. The average pore diameter and depth of the AAO membrane with a pore-widening time of 20 min were 123nm and 273.5nm, respectively. At a pore-widening time of 20 min, the EIM device using anodic aluminum oxide exhibited a high sensitivity (56mV/pH), hysteresis voltage (6.2mV) and drift rate (0.25mV/pH).
 Keywords
Nanostructures;Electrochemical properties;
 Language
English
 Cited by
 References
1.
P. Bergveld, IEEE Trans. Biomed. Eng., vol. BME-17, pp. 70-71, 1970. crossref(new window)

2.
Lee. C. S., Kim. S. K., and M. I., Sensors, vol. 9, pp. 7111-7131, 2009. crossref(new window)

3.
M. J. Schöning, Sensors and Actuators B, vol. 65, pp. 288-290, 2000. crossref(new window)

4.
C. D. Fung, IEEE Trans. Electron Dev., vol. 33, pp. 8-18, 1986. crossref(new window)

5.
P. V. Bobrov, Sensors and Actuators B, vol. 3, pp. 75-81, 1991. crossref(new window)

6.
C. S. Lai, Solid state lett., vol. 9, pp. 90-92, 2006. crossref(new window)

7.
S. Yoshida, J. Electrochem. Soc., vol. 151, pp. 53-58, 2004.

8.
T. M Pan, Sensors and Actuators B, vol. 138, pp. 619-624, 2009. crossref(new window)

9.
H. Masuda, H. Yamada, Masahiro and H. Asoh, Applied Physics Letters, vol. 71, pp. 2770-2772, 1997. crossref(new window)

10.
H. Masuda, A. Yotsuya, M. Asano, K. Nishio, M. Nako, A. Yokoo, T. Tamamura, Applid Physics Letters, vol.78, pp.826-828, 2001. crossref(new window)

11.
C. C. Chen, J. H. Chen, C. G. Chao, Japanese Journal of Applied Physics, vol. 44, pp. 1529-1533, 2005. crossref(new window)

12.
D. L. Harame, L. J. Bousse, J. D. Shott, J. D. Meindl, IEEE Trans. Electron Devices, vol. 34, pp. 1700-1707, 1987. crossref(new window)

13.
M.J. Schöning, F. Ronkel, M. Crott, M. Thust, J.W. Schultze, P. Kordos, H. Lüth, Electrochimica Acta, vol. 42, pp. 3185-3193, 1997. crossref(new window)

14.
L. Bousse, Sensors and Actuators B, vol. 2, pp. 103-110, 1990. crossref(new window)

15.
T. M. Pan, Sensors and Actuators B, vol. 144, pp. 139-145, 2010. crossref(new window)

16.
M. S. Islam, Sensors and Actuators B, vol. 171-172, pp. 238-243, 2012. crossref(new window)