C. Liu, W. Huang, Z. Shi, and W. Xu, “Wavefront aberration compensation of projection lens using clocking lens elements,” Appl. Opt. 52, 5398-5401 (2013).
M. Y. Ni and Y. Gong, “Design and analysis of kinematic lens positioning structure in lithographic projection objective,” Chinese Optics 5, 476-484 (2012).
L. Zhao and Y. Gong, “Design and analysis for high-precision lens support structure of objective lens for lithography,” Acta Optica Sinica 9, 217-222 (2012).
T. Nakashima, Y. Ohmura, T. Ogata, Y. Uehara, H. Nishinaga, and T. Matsuyama, “Thermal aberration control in projection lens,” Proc. SPIE 6924, 69241V-1~69241V-9 (2008).
X. F. Yu, M. Y. Ni, W. Zhang, Y. X. Sui, and S. Qin, “Analysis and experiments of the thermal-optical performance for a kinematically mounted lens element,” Appl. Opt. 53, 4079-4084 (2014).
Y. Uehara, T. Matsuyama, T. Nakashima, Y. Ohmura, T. Ogata, and K. Suzuki, “Thermal aberration control for low-k1 lithography,” Proc. SPIE 6520, 65202V-1~65202V-11 (2007).
H. Chen, H. J. Yang, X. F. Yu, and Z. G. Shi, “Simulated and experimental study of laser-beam-induced thermal aberrations in precision optical systems,” Appl. Opt. 52, 4370-4376 (2013).
K. Fukuhara, A. Mimotogi, T. Kono, H. Aoyama, T. Ogata, and N. Kita, “Solutions with precise prediction for thermal aberration error in low-k1 immersion lithography,” Proc. SPIE 8683, 86830U-1~86830U-7 (2013).
W. L. Shang, J. M. Yang, Y. Zhao, T. Zhu, and G. Xiong, “General model of transmission grating diffraction efficiency,” Acta Physica Sinica 60, 392-397 (2011).
S. Qin, Y. Gong, W. Q. Yuan, and H. J. Yang, “High precision temperature control for projection lens with long time thermal response constant,” Optics and Precision Engineering 21, 108-114 (2013).
Y. P. Shen, “A dissertation submitted in partial fulfillment of the requirements for the degree of doctor of philosophy in engineering (in Chinese),” Huazhong University of Science and Technology, 39 (2014).
HPFS Fused Silica Standard Grade Semiconductor Optics, Corning Inc..
SigFit Reference Manual, Version 2012R1d, Sigmadyne Inc., p. 127.
K. B. Doyle, V. L Genberg, and G. J. Michels, “Numerical methods to compute optical errors due to stress birefringence,” Proc. SPIE 34, 34-42 (2002).