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Thermal Characterization of Individual Pixels in Microbolometer Image Sensors by Thermoreflectance Microscopy
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 Title & Authors
Thermal Characterization of Individual Pixels in Microbolometer Image Sensors by Thermoreflectance Microscopy
Ryu, Seon Young; Choi, Hae Young; Kim, Dong Uk; Kim, Geon Hee; Kim, Taehyun; Kim, Hee Yeoun; Chang, Ki Soo;
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 Abstract
Thermal characterization of individual pixels in microbolometer infrared image sensors is needed for optimal design and improved performance. In this work, we used thermoreflectance microscopy on uncooled microbolometer image sensors to investigate the thermal characteristics of individual pixels. Two types of microbolometer image sensors with a shared-anchor structure were fabricated and thermally characterized at various biases and vacuum levels by measuring the temperature distribution on the surface of the microbolometers. The results show that thermoreflectance microscopy can be a useful thermal characterization tool for microbolometer image sensors.
 Keywords
Microbolometer;infrared image sensor;thermoreflectance microscopy;thermal characterization;
 Language
English
 Cited by
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