Publisher : The Institute of Electronics Engineers of Korea
DOI : 10.5573/JSTS.2016.16.2.153
Title & Authors
Characterization of Stiffness Coefficients of Silicon Versus Temperature using "Poisson's Rati" Measurements Cho, Chun-Hyung; Cha, Ho-Young; Sung, Hyuk-Kee;
The elastic material constants, stiffness constants (, , and ), are three unique coefficients that establish the relation between stress and strain. Accurate knowledge of mechanical properties and the stiffness coefficients for silicon is required for design of Micro-Electro-Mechanical Systems (MEMS) devices for proper modeling of stress and strain in electronic packaging. In this work, the stiffness coefficients for silicon as a function of temperature from to have been extracted by using the experimental measurements of Poisson's ratio () of silicon in several directions.