Characterization of Stiffness Coefficients of Silicon Versus Temperature using "Poissons Rati" Measurements

Title & Authors
Characterization of Stiffness Coefficients of Silicon Versus Temperature using "Poissons Rati" Measurements
Cho, Chun-Hyung; Cha, Ho-Young; Sung, Hyuk-Kee;

Abstract
The elastic material constants, stiffness constants ($\small{c_{11}}$, $\small{c_{12}}$, and $\small{c_{44}}$), are three unique coefficients that establish the relation between stress and strain. Accurate knowledge of mechanical properties and the stiffness coefficients for silicon is required for design of Micro-Electro-Mechanical Systems (MEMS) devices for proper modeling of stress and strain in electronic packaging. In this work, the stiffness coefficients for silicon as a function of temperature from $\small{-150^{\circ}C}$ to $\small{+25^{\circ}C}$ have been extracted by using the experimental measurements of Poissons ratio ($\small{{\nu}}$) of silicon in several directions.
Keywords
Stiffness coefficients;compliance coefficients;Poissons ratio;
Language
English
Cited by
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