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Synthesis of Carbon Nanowalls by Microwave PECVD for Battery Electrode
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 Title & Authors
Synthesis of Carbon Nanowalls by Microwave PECVD for Battery Electrode
Kim, Sung Yun; Shin, Seung Kwon; Kim, Hyungchul; Jung, Yeun-Ho; Kang, Hyunil; Choi, Won Seok; Kweon, Gi Back;
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The microwave plasma enhanced chemical vapor deposition (PECVD) system was used to grow a carbon nanowall (CNW) on a silicon (Si) substrate with hydrogen (H2) and methane (CH4) gases. To find the growth mechanism of CNW, we increased the growth time of CNW from 5 to 30 min. The vertical and surficial conditions of the grown CNWs according to growth time were characterized by field emission scanning electron microscopy (FE-SEM). Energy dispersive spectroscopy (EDS) measurements showed that the CNWs consisted solely of carbon.
Carbon based nanomaterial;Carbon nanowall;Microwave plasma enhanced vapor deposition;Carbon electrode;Growth time;
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