JOURNAL BROWSE
Search
Advanced SearchSearch Tips
Optical Properties of Multi-layer TiNO/AlCrNO/Al Cermet Films Using DC Magnetron Sputtering
facebook(new window)  Pirnt(new window) E-mail(new window) Excel Download
 Title & Authors
Optical Properties of Multi-layer TiNO/AlCrNO/Al Cermet Films Using DC Magnetron Sputtering
Han, Sang-Uk; Park, Soo-Young; Kim, Hyun-Hoo; Jang, Gun-Eik; Lee, Yong-Jun;
  PDF(new window)
 Abstract
Among many the oxynitrides, TiNO and AlCrNO, have diverse applications in different technological fields. We prepared TiNO/AlCrNO/Al thin films on aluminum substrates using the method of dc reactive magnetron sputtering. The reactive gas flow, gas mixture, and target potential were applied as the sputtering conditions during the deposition in order to control the chemical composition. The multi-layer films have been prepared in an Ar and O2+N2 gas mixture rate. The surface properties were estimated by performing scanning electron microscopy (SEM). At a wavelength range of 0.3~2.5 μm, the exact composition and optical properties of thin films were measured by Auger electron spectroscopy (AES) and Ultraviolet-visible-near infrared (UV-Vis-NIR) spectrophotometry. The optimal absorptance of multi-layer films was exhibited above 95.5% in the visible region of the electromagnetic spectrum, and the reflectance was achieved below 1.89%.
 Keywords
DC magnetron sputter;Multi-layer;Optical properties;Absorptance;Reflectance;
 Language
English
 Cited by
 References
1.
H. C. Barshilia, N. Selvakumar, and K. S. Rajam, Appl. Phys. Lett., 89, 1 (2006). [DOI: http://dx.doi.org/10.1063/1.2387897] crossref(new window)

2.
D. H. Oh, S. U. Han, H. H. Kim, G. E. Jang, and Y. J. Lee, J. Korean Inst. Electr. Electron. Mater. Eng., 12, 820 (2014).

3.
C. E. Kennedy, NREL Technical Report No. NREL/LP-520-31267 (2002).

4.
S. Esposito, A. Antonaia, M. L. Addonizio, and S. Aprea, Thin Solid Films, 517, 6000 (2009). [DOI: http://dx.doi.org/10.1016/j.tsf.2009.03.191] crossref(new window)

5.
R. C. Juang, Y. C. Yeh, B. H. Chang, W. C. Chen, and T. W. Chung, Thin Solid Films, 518, 5501 (2010). [DOI: http://dx.doi.org/10.1016/j.tsf.2010.04.025] crossref(new window)

6.
H. C. Barshilia, Sol. Energy Mater. & Sol. Cells, 130, 322 (2014). [DOI: http://dx.doi.org/10.1016/j.solmat.2014.07.037] crossref(new window)

7.
J. Chen, C. Guo, J. Chen, J. He, Y. Ren, and L. Hu, Mater. Lett., 133, 71 (2014). [DOI: http://dx.doi.org/10.1016/j.matlet.2014.06.159] crossref(new window)

8.
H. Murata and T. Ohba, Mater. Trans., 12, 2907 (2008). [DOI: http://dx.doi.org/10.2320/matertrans.MRP2008206] crossref(new window)

9.
H. C. Barshilia, Sol. Energy Mater. & Sol. Cells, 130, 322 (2014). [DOI: http://dx.doi.org/10.1016/j.solmat.2014.07.037] crossref(new window)

10.
Q. C. Zhang, Sol. Energy Mater. & Sol. Cells, 62, 63 (2000). [DOI: http://dx.doi.org/10.1016/S0927-0248(99)00136-1] crossref(new window)

11.
M. Du, X. Liu, L. Hao, X. Wang, J. Mi, L. Jiang, and Q. Yu, Sol. Energy Mater. & Sol. Cells, 111, 49 (2013). [DOI: http://dx.doi.org/10.1016/j.solmat.2012.12.010] crossref(new window)

12.
H. C. Barshilia, N. Selvakumar, B. Deepthi, and K. S. Rajam, Surf. Coat. Technol., 201, 2193 (2006). [DOI: http://dx.doi.org/10.1016/j.surfcoat.2006.03.037] crossref(new window)

13.
Q. C. Zhang, M. S. Hadavi, K. D. Lee, and Y. G. Shen, J. Phys. D: Appl. Phys., 36, 723 (2003). [DOI: http://dx.doi.org/10.1088/0022-3727/36/6/315] crossref(new window)

14.
K. D. Lee, J. Kor. Sol. Energy Soc., 33, 31 (2013). [DOI: http://dx.doi.org/10.7836/kses.2013.33.4.031] crossref(new window)

15.
T. I. Ohm, W. T. Yeo, and D. C. Kim, J. Kor. Sol. Energy Soc., 33, 27 (2013). [DOI: http://dx.doi.org/10.7836/kses.2013.33.3.027] crossref(new window)

16.
A. R. Shashikala, A. K. Sharma, and D. R. Bhandari, Sol. Energy Mater. & Sol. Cells, 91, 629 (2007). [DOI: http://dx.doi.org/10.1016/j.solmat.2006.12.001] crossref(new window)

17.
E. Barrera-Calva, A. Avila, J. Mena, V. H. Lara, M. Ruiz, and J. Mendez-Vivar, Sol. Energy Mater. & Sol. Cells, 76, 387 (2003). [DOI: http://dx.doi.org/10.1016/S0927-0248(02)00290-8] crossref(new window)