Publisher : The Korean Institute of Electrical and Electronic Material Engineers
DOI : 10.4313/TEEM.2016.17.2.118
Title & Authors
A Short Wavelength Coplanar Waveguide Employing Periodic 3D Coupling Structures on Silicon Substrate Yun, Young;
A coplanar waveguide employing periodic 3D coupling structures (CWP3DCS) was developed for application in miniaturized on-chip passive components on silicon radio frequency integrated circuits (RFIC). The CWP3DCS showed the shortest wavelength of all silicon-based transmission line structures that have been reported to date. Using CWP3DCS, a highly miniaturized impedance transformer was fabricated on silicon substrate, and the resulting device showed good RF performance in a broad band from 4.6 GHz to 28.6 GHz. The device as was 0.04 mm2 in size, which is only 0.74% of the size of the conventional transformer on silicon substrate.
Short wavelength;Coplanar waveguide;Coupling structure;Silicon substrate;Impedance transformer;
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