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Design and Fabrication of a Vacuum Chamber for a Commercial Atomic Force Microscope
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 Title & Authors
Design and Fabrication of a Vacuum Chamber for a Commercial Atomic Force Microscope
Park, Sang-Joon; Jeong, Yeon-Uk; Park, Soyeun; Lee, Yong Joong;
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A vacuum chamber for a commercial atomic force microscope (AFM) is designed and fabricated. Only minimal modifications were made to an existing microscope in an effort to work in a vacuum environment, while most of the available AFM functionalities were kept intact. The optical alignment needed for proper AFM operations including a SLD (superluminescent diode) and a photodiode can be made externally without breaking the vacuum. A vacuum level of torr was achieved with a mechanical pump. An enhancement of the quality factor was observed along with a shift in the resonance frequency of a non-contact-mode cantilever in a vacuum. Topographical data of a calibration sample were also obtained in air and in a low vacuum using the non-contact mode and the results were compared.
Vacuum chamber;Atomic force microscope;Quality (Q) factor;
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