Design and Fabrication of a Vacuum Chamber for a Commercial Atomic Force Microscope

Title & Authors
Design and Fabrication of a Vacuum Chamber for a Commercial Atomic Force Microscope
Park, Sang-Joon; Jeong, Yeon-Uk; Park, Soyeun; Lee, Yong Joong;

Abstract
A vacuum chamber for a commercial atomic force microscope (AFM) is designed and fabricated. Only minimal modifications were made to an existing microscope in an effort to work in a vacuum environment, while most of the available AFM functionalities were kept intact. The optical alignment needed for proper AFM operations including a SLD (superluminescent diode) and a photodiode can be made externally without breaking the vacuum. A vacuum level of $\small{5{\times}10^{-3}}$ torr was achieved with a mechanical pump. An enhancement of the quality factor was observed along with a shift in the resonance frequency of a non-contact-mode cantilever in a vacuum. Topographical data of a calibration sample were also obtained in air and in a low vacuum using the non-contact mode and the results were compared.
Keywords
Vacuum chamber;Atomic force microscope;Quality (Q) factor;
Language
English
Cited by
References
1.
G. Binning, C. F. Quate, and Ch. Gerber, Phys. Rev. Lett. 56, 930 (1986).

2.
G. Binnig, H. Rohrer, Ch. Gerber, and E. Weibel, Phys. Rev. Lett. 49, 57 (1982).

3.
S. Kasas, N. H. Thomson, B. L. Smith, P. K. Hansma, J. Miklossy, and H. G. Hansma, Int. J. Imaging Syst. Technol. 8, 151 (1997).

4.
K. C. Chang, Y. W. Chiang, C. H. Yang, and J. W. Liou, Tzu Chi Medical Journal 24, 162 (2012).

5.
P. A. Cox, D. A. Waldow, T. J. Dupper, S. Jesse, and D. S. Ginger, ACS Nano 7, 10405 (2013).

6.
G. Shao, G. E. Rayermann, E. M. Smith, and D. S. Ginger, J. Phys. Chem. B 117, 4654 (2013).

7.
N. Balke, D. Bonnell, D. S. Ginger, and M. Kemerink, MRS Bulletin 37, 633 (2012).

8.
R. Giridharagopal, G. E. Rayermann, G. Shao, D. T. Moore, O. G. Reid, and D. S. Ginger, Nano Letters 12, 893 (2012).

9.
C. Groves, O. G. Reid, and D. S. Ginger, Accounts of Chemical Research 43, 612 (2010).

10.
J. Lievonen, K. Ranttila, and M. Ahlskog, Rev. Sci. Instrum. 78, 043703 (2007).

11.
J. Lubbe, M. Temmen, H. Schnieder, and M. Reichling, Meas. Sci. Technol. 22, 055501 (2011).