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Measurement Uncertainties for Vacuum Standards from a Low to an Ultra-high Vacuum
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 Title & Authors
Measurement Uncertainties for Vacuum Standards from a Low to an Ultra-high Vacuum
Hong, S.S.; Shin, Y.H.; Lim, J.Y.;
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 Abstract
The Korea Research Institute of Standards and Science (KRISS) has three major vacuum systems: an ultrasonic interferometer manometer (UIM; Section II, Figs. 1 and 2) for a low vacuum, a static expansion system (SES; Section III, Figs. 3 and 4) for a medium vacuum, and an orifice-type dynamic expansion system (DES, Section IV, Figs. 5 and 6) for high and ultra-high vacuum systems. For each system, explicit measurement model equations with multiple variables are given. According to ISO standards, all of these system variable errors were used to calculate the expanded uncertainty (U). For each system, the expanded uncertainties (k
 Keywords
Vacuum standard;Ultrasonic interferometer manometer;Static expansion system;Orifice conductance;Dynamic expansion system;Uncertainty;
 Language
English
 Cited by
 References
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