Advanced SearchSearch Tips
Vacuum Characteristic of a Chamber Made of Mild Steel
facebook(new window)  Pirnt(new window) E-mail(new window) Excel Download
 Title & Authors
Vacuum Characteristic of a Chamber Made of Mild Steel
Park, Chongdo; Ha, Taekyun; Cho, Boklae;
  PDF(new window)
The base pressure and outgassing rate of a mild steel chamber were measured and compared to those of a stainless steel chamber. A combined sputter-ion and non-evaporable getter pump with a nominal pumping speed of 490 l/s generated the base pressure of mbar in the mild steel chamber and mbar in the stainless steel chamber. The rate-of-rise measurements show that the mild steel has an extremely low outgassing rate of mbar , which is about one-order of magnitude smaller than the outgassing rate of the stainless steels. Vacuum annealing of the mild steel at reduced the outgassing rate further to mbar , which was comparable to the outgassing rate of a heat treated stainless steel for extreme-high vacuum use.
Outgassing rate;Mild steel;UHV;
 Cited by
L. W. Swanson, and G. A. Schwind, Adv. Imag. Electron Phys. 159, 63 (2009). crossref(new window)

Karl Jousten (Ed.), Handbook of Vacuum Technology (Wiley-VCH, 2008), p 735.

Y. Ishimori, N. Yoshimura, S. Hasegawa and H. Oikawa, J. Vac. Soc. Jpn. 14, 295 (1971). crossref(new window)

J. Kamiya, N. Ogiwara, M. Nishikawa, Y. Hikichi, T. Yanagibashi, and M. Kinsho, Vacuum 98, 12 (2013). crossref(new window)

P. A. Redhead, J. Vac. Sci. Technol. A 20, 1667 (2002). crossref(new window)

C. D. Park, S. M. Chung, Xianghong Liu and Yulin Li, J. Vac. Sci. Technol. A 26, 1166 (2008). crossref(new window)

M. Li and H. F. Dylla, J. Vac. Sci. Technol. A 11, 1702 (1993).

H. F. Dylla and W. R. Blanchard, "A Comparison of Outgassing Rates from Stainless and Carbon Steels", AVS 46th International Symposium, Seattle, WA, Oct. 25-29, 1999.

Md Abdullah A. Mamun, Abdelmageed A. Elmustafa, Marcy L. Stutzman, Philip A. Adderley, and Matthew Poelker, J. Vac. Sci. Technol. A 32, 021604 (2014). crossref(new window)

Donald J. Santeler, J. Vac. Sci. Technol. A 10, 1879 (1992). crossref(new window)