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Vacuum Characteristic of a Chamber Made of Mild Steel
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 Title & Authors
Vacuum Characteristic of a Chamber Made of Mild Steel
Park, Chongdo; Ha, Taekyun; Cho, Boklae;
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 Abstract
The base pressure and outgassing rate of a mild steel chamber were measured and compared to those of a stainless steel chamber. A combined sputter-ion and non-evaporable getter pump with a nominal pumping speed of 490 l/s generated the base pressure of mbar in the mild steel chamber and mbar in the stainless steel chamber. The rate-of-rise measurements show that the mild steel has an extremely low outgassing rate of mbar , which is about one-order of magnitude smaller than the outgassing rate of the stainless steels. Vacuum annealing of the mild steel at reduced the outgassing rate further to mbar , which was comparable to the outgassing rate of a heat treated stainless steel for extreme-high vacuum use.
 Keywords
Outgassing rate;Mild steel;UHV;
 Language
English
 Cited by
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