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Vanadium Oxide Microbolometer Using ZnO Sandwich Layer
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 Title & Authors
Vanadium Oxide Microbolometer Using ZnO Sandwich Layer
Han, Myung-Soo; Kim, Dae Hyeon; Ko, Hang Ju; Kim, Heetae;
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Optical, electrical and structural properties of VOx/ZnO/VOx thin film are studied. The VOx/ZnO/VOx multilayer is deposited by using a radio frequency (RF) sputtering system. The VOx/ZnO/VOx thin film shows the high temperature coefficient of resistance (TCR) of and the low sheet resistance of about 80 at room temperature. The responsivity and detectivity of the bolometer are measured as a function of modulation frequency.
IR detector;Microbolometer;Oxygen annealing;TCR;
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