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A Three-Dimensional Calculation of the Reactor Impedance for Planar-Type Cylindrical Inductively Coupled Plasma Sources
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 Title & Authors
A Three-Dimensional Calculation of the Reactor Impedance for Planar-Type Cylindrical Inductively Coupled Plasma Sources
Kwon, Deuk-Chul; Yoon, Nam-Sik;
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 Abstract
The reactor impedance is calculated for a planar-type cylindrical inductively coupled plasma source by expanding the electromagnetic fields into their Fourier-Bessel series forms including the three-dimensional shape of the antenna. The mode excitation method is utilized to determine the electromagnetic fields based on a Poynting theorem-like relationship. From the obtained electromagnetic fields, a tractable form of the reactor impedance is obtained as a function of various plasma and geometrical parameters and applied to carry out a parametric study.
 Keywords
Electromagnetic fields;ICP;Reactor impedance;
 Language
English
 Cited by
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