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Chemical Vapor Deposition Using Ethylene Gas toward Low Temperature Growth of Single-Walled Carbon Nanotubes
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 Title & Authors
Chemical Vapor Deposition Using Ethylene Gas toward Low Temperature Growth of Single-Walled Carbon Nanotubes
Jo, Sung-Il; Jeong, Goo-Hwan;
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We demonstrate the growth of single-walled carbon nanotubes (SWNTs) using ethylene-based chemical vapor deposition (CVD) and ferritin-induced catalytic particles toward growth temperature reduction. We first optimized the gas composition of and at 500 and 30 sccm, respectively. On a planar substrate, high density SWNTs were grown at a minimum temperature of . In the case of growth using nanoporous templates, many suspended SWNTs were also observed from the samples grown at ; low values of in the Raman spectra were also obtained. This means that the temperature of is sufficient for SWNT growth in ethylene-based CVD and that ethylene is more effective that methane for low temperature growth. Our results provide a recipe for low temperature growth of SWNT; such growth is crucial for SWNT-based applications.
Ethylene;Chemical vapor deposition;Single-walled carbon nanotube;Low-temperature growth;Zeolite;
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