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Investigation of Post Annealing Effect on the PZT Thin Films
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  • Journal title : Journal of the Chosun Natural Science
  • Volume 8, Issue 4,  2015, pp.244-249
  • Publisher : The Research Institute of Chosun Natural Science
  • DOI : 10.13160/ricns.2015.8.4.244
 Title & Authors
Investigation of Post Annealing Effect on the PZT Thin Films
Choi, Sujin; Park, Juyun; Koh, Sung-Wi; Kang, Yong-Cheol;
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The PZT thin films were deposited on Si(100) substrate using RF magnetron sputtering method. And the PZT thin films were post annealed at various temperatures to form perovskite phase. To analyze PZT thin films, surface profiler, XRD, XPS, CA, and SFE were used. The thickness increased from 536.5 to 833.2 nm as post annealing temperature increased. The perovskite PZT was observed from PZT-823 and pyrochlore PZT, , , and perovskite were observed. From the XPS, the atomic percentages of Pb, Zr, Ti, and O were calculated and the portion of Pb increased to PZT-823 and decreased to PZT-923 and then increased to PZT-1023. Also, the CA and SFE was effected on post annealing temperature and as a function of atomic percentage of Pb, the CA and SFE was transformed.
Thin Film;X-ray Diffraction;Lead Zirconate Titanate;
 Cited by
C.C. Chang and C.S. Tang, "An integrated pyroelectric infrared sensor with a PZT thin film", Sensor. Actuat. A-Phys., Vol. 65, pp. 171-174, 1998. crossref(new window)

W. Zhu, K. Yao, and Z. Shang, "Novel structured multilayer piezoelectric PZT micro-actuators using screen printing technology", Ferroelectrics, Vol. 224, pp. 153-160, 1999. crossref(new window)

F. Chen, R. Schafranek, S. Li, W. B. Wu, and A. Klein, "Energy band alignment between $Pb(Zr,Ti)O_3$ and high and low work function conducting oxides from hole to electron injection", J. Phys. D Appl. Phys., Vol. 43, pp. 295301(6pp), 2010. crossref(new window)

A. Bose and M. Sreemany, "Influence of processing conditions on the structure, composition and ferroelectric properties of sputtered PZT thin films on Tisubstrates", Appl. Surf. Sci., Vol. 289, pp. 551-559, 2014. crossref(new window)

M. M. Zhu, Z. H. Du, and J. Ma, "Defect enhanced optic and electro-optic properties of lead zirconate titanate thin films", AIP Adv., Vol. 1, pp. 042144, 2011. crossref(new window)

C. H. Park, M. S. Won, C. S. Lee, W. H. Cha, and Y. G. Son, "Pyroelectric properties and X-ray photoelectron spectroscopic study of R.F. magnetronsputtering- derived PZT thin films deposited on various interlayers", J. Electroceram., Vol. 17, pp. 619- 623, 2006. crossref(new window)

A. Bose, S. Bysakh, M. Mukherjee, A. K. M. Maidul Islam, A. K. Balamurugan, and S. Sen, "Characterization of RF sputter-deposited ultra thin PZT films and its interface with substrate", Integr. Ferroelectr., Vol. 120, pp. 37-48, 2010. crossref(new window)

A. Bhaskar, H. Y. Chang, T. H. Chang, and S. Y. Cheng, "Effect of microwave annealing temperatures on lead zirconate titanate thin films", Nanotechnology Vol. 18, pp. 395704(7pp), 2007. crossref(new window)

C. V. R. Vasant Kumar, R. Pascual, and M. Sayer, "Crystallization of sputtered lead zirconate titanate films by rapid thermal processing", J. Appl. Phys., Vol. 71, pp. 864-874, 1992. crossref(new window)

R. Thomas, S. Mochizuki, T. Mihara, and T. Ishida, "Effect of substrate temperature on the crystallization of $Pb(Zr,Ti)O_3$ films on Pt/Ti/Si/ substrates prepared by radio frequency magnetron sputtering with a stoichiometric oxide target", Mater. Sci. Eng. B-Adv., Vol. 95, pp. 36-42, 2002. crossref(new window)

K. G. Brooks, I. M. Reaney, R. Klissurska, Y. Huang, L. Brusill, and N. Setter, "Orientation of rapid thermally annealed lead zirconate titanate thin films on (111) Pt substrates", J. Mater. Res., Vol. 9, pp. 2540-2553, 1994. crossref(new window)

N. Wakiya, K. Kuroyanagi, Y. Xuan, K. Shinozakim, and N. Mizutani, "An XPS study of the nucleation and growth behavior of an epitaxial $Pb(Zr,Ti)O_3$/MgO(110) thin film prepared by MOCVD", Thin Solid Films, Vol. 372, pp 156-162, 2000. crossref(new window)

J. Yu, J. C. Yu, B. Cheng, and X. Zhao, "Photocatalytic activity and characterization of the sol-gel derived Pb-doped $TiO_2$ thin films", J. Sol-Gel Sci. Techn., Vol. 24, pp. 39-48, 2002. crossref(new window)

J. M. Koo, H. S. Min, W. H. Lee, J. G. Lee, J. Y. Kim, and J. H. Ahn, "Influences of hydrogen damages in ferroelectric thin film capacitors", Ferroelectrics, Vol. 260, pp. 279-284, 2001. crossref(new window)

P. Verardi, F. Craciun, L. Mirenghi, M. Dinescu, and V. Sandu, "An XPS and XRD study of physical and chemical homogeneity of $Pb(Zr,Ti)O_3$ thin films obtained by pulsed laser deposition", Appl. Surf. Sci., Vol. 138-139, pp. 552-556, 1999.

F. Bortolani, A. Campo, J. F. Fernandez, F. Clemens, and F. Rubio-Marcos, "High strain in $(K,Na)NbO_3$-based lead-free piezoelectric fibers", Chem. Mater., Vol. 26, pp. 3838-3848, 2014. crossref(new window)

K. Idczak, M. Skiscim, and L. Markowski, "Comparison of the adsorption of thin zirconium and titanium oxides films on the 6H-SiC(0001) surface", Cryst. Res. Technol., Vol. 47, pp. 329-332, 2012. crossref(new window)

X. G. Tang, A. L. Ding, and W. G. Luo, "Surface morphology and chemical states of highly oriented $PbZrO_3$ thin films prepared by a sol-gel process", Appl. Surf. Sci., Vol. 174, pp. 148-154, 2001. crossref(new window)

A. C. Galca, V. Stancu, M. A. Husanu, C. Dragoi, N. G. Gheorghe, L. Trupina, M. Enculescu, and E. Vasile, "Substrate-target distance dependence of structural and optical properties in case of $Pb(Zr,Ti)O_3$ films obtained by pulsed laser deposition", Appl. Surf. Sci., Vol. 257, pp. 5938-5943, 2011. crossref(new window)

C. H. Park, M. S. Won, Y. H. Oh, and Y. G. Son, "An XPS study and electrical properties of $Pb_{1.1}Zr_{0.53}Ti_{0.47}O_3/PbO/Si$ (MFIS) structures according to the substrate temperature of the PbO butter layer", Appl. Surf. Sci., Vol. 252, pp. 1988-1997, 2005. crossref(new window)

A. A. Ogwu, E. Bouquerel, O. Ademosu, S. Moh, E. Crossan, and F. Placido, "An investigation of the surface energy and optical transmittance of copper oxide thin films prepared by reactive magnetron sputtering", Acta. Mater., Vol. 53, pp 5151-5159, 2005. crossref(new window)