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Design of a 6-Axis Inertial Sensor IC for Accurate Location and Position Recognition of M2M/IoT Devices
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 Title & Authors
Design of a 6-Axis Inertial Sensor IC for Accurate Location and Position Recognition of M2M/IoT Devices
Kim, Chang Hyun; Chung, Jong-Moon;
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Recently, inertial sensors are popularly used for the location and position recognition of small devices for M2M/IoT. In this paper, we designed low power, low noise, small sized 6-axis inertial sensor IC for mobile applications, which uses a 3-axis piezo-electric gyroscope sensor and a 3-axis piezo-resistive accelerometer sensor. Proposed IC is composed of 3-axis gyroscope readout circuit, two gyroscope sensor driving circuits, 3-axis accelerometer readout circuit, 16bit sigma-delta ADC, digital filter and control circuit and memory. TSMC mixed signal CMOS process was used. Proposed IC reduces 27% of the current consumption of LSM330.
gyroscope;accelerometer;MEMS;inertial sensor;piezo;
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