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Improvement of Reproducibility in Selective Electrodeposition Using Laser Masking and DC Voltage
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 Title & Authors
Improvement of Reproducibility in Selective Electrodeposition Using Laser Masking and DC Voltage
Shin, Hong Shik;
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 Abstract
A method is proposed for the improvement of deposition reproducibility in the selective electrodeposition process using laser masking and DC voltage. Selective electrodeposition using laser masking and DC voltage can achieve a deposited layer with micro patterns. However, selective electrodeposition using laser masking and DC voltage have a critical problem: the lack of reproducibility in selective deposition. The reproducibility of selective electrodeposition can be improved by a new process that consists of laser masking, two-step electro-deposition, laser scribing, and ultrasonic cleaning. The experiments in this study show that the reproducibility of selective deposition can be successfully improved by the combination of two-step electrodeposition and laser scribing.
 Keywords
Laser masking;Laser scribing;Electrodeposition characteristics;Copper layer;DC voltage;
 Language
Korean
 Cited by
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