Publisher : The Materials Research Society of Korea
DOI : 10.3740/MRSK.2016.26.4.222
Title & Authors
Analysis of Sputter-Deposited SnO thin Film with SnO/Sn Composite Target Kim, Cheol; Kim, Sungdong; Kim, Sarah Eunkyung;
Tin oxides have been studied for various applications such as gas detecting materials, transparent electrodes, transparent devices, and solar cells. p-type SnO is a promising transparent oxide semiconductor because of its high optical transparency and excellent electrical properties. In this study, we fabricated p-type SnO thin film using rf magnetron sputtering with an SnO/Sn composite target; we examined the effects of various oxygen flow rates on the SnO thin films. We fundamentally investigated the structural, optical, and electrical properties of the p-type SnO thin films utilizing X-ray diffraction (XRD), X-ray photoelectron spectroscopy (XPS), UV/Vis spectrometry, and Hall Effect measurement. A p-type SnO thin film of was obtained with > 80% transmittance, carrier concentration of , and mobility of . With increasing of the oxygen partial pressure, electrical conductivity transition from p-type to n-type was observed in the SnO crystal structure.