Advanced SearchSearch Tips
Electrical properties of piezoelectric PZT thick film by aerosol deposition method
facebook(new window)  Pirnt(new window) E-mail(new window) Excel Download
 Title & Authors
Electrical properties of piezoelectric PZT thick film by aerosol deposition method
Kim, Ki-Hoon; Bang, Kook-Soo; Park, Dong-Soo; Park, Chan;
  PDF(new window)
Lead zirconate titanate (PZT) thick films with thickness of were fabricated on silicon substrate by aerosol deposition method. As-deposited films on silicon were annealed at the temperatures of . The electrical properties of films deposited by PZT powders were characterized using impedance analyzer and Sawyer-Tower circuit. The PZT powder was prepared by both conventional solid reaction process and sol-gel process. The remanent polarization, coercive field, and dielectric constant of the thick film with solid reaction process were , 30 kV/cm and 1320, respectively. On the other hand, the PZT films by sol-gel process showed a poor dielectric constant of 635. The reason was probably due to the presence of pores produced from organic residue during annealing.
PZT powder;Sol-gel process;Aerosol deposition method;Dielectric constant;Piezoelectric coefficient;Hysteresis loop;Remnant polarization;Coercive field;
 Cited by
R.A. Dorey and R.W. Whatmore, "Electroceramic thick film fabrication for MEMS:, J. Electroceram. 12 (2004) 19. crossref(new window)

G.H. Haertling, "Ferroeletric ceramics: History and technology", J. Amer. Cera. Soc. 84 (1999) 797.

J.H. Kim, J.H. Hwang, T.Y. Lim and S.H. Kim, "Fabrication and properties of superhydrophobic $SiO_2$ thin film by sol-gel method", J. Korean Cryst. Growth Cryst. Technol. 19 (2009) 277.

N. Setter, "Electroceramics: Looking ahead", J. Euro. Ceram. Soc. 21 (2001) 1279. crossref(new window)

J. Akedo and M. Lebedev, "Microstructure and electrical properties of lead zirconate titanate thick films deposited by aerosol deposition method", Japan J. Appl. Phys. 38 (1999) 5397. crossref(new window)

J.J. Choi, J.H. Jang, B.D. Hahn, D.S. Park, W.H. Yoon, J.H. Ryu and C. Park, "Preparation of highly dense PZN-PZT thick films by the aerosol deposition method using excess PbO powder", J. Amer. Cera. Soc. 90 (2007) 3389. crossref(new window)

A.G. Evans and J.W. Hutchinson, "The thermomechanical integrity of thin films and multilayers", Acta Metall. et Mater. 43 (1995) 2507. crossref(new window)

K.H. Kim, K.S. Bang and C. Park "Fabrication of piezoelectric PZT film by aerosol deposition method", J. Ocean Eng. Tech. 27 (2013) 95. crossref(new window)

Y. Park, J.K. Lee, I. Chung and J.Y. Lee, "Delamination behavior of Pt in a $SiO_2/Pb(ZrxTi1-x)O_3/Pt$ ferroelectric thin-film capacitor", J. Appl. Phys. 89 (2001) 2327. crossref(new window)

J.H. Park, K.S. Bang and C. Park, "Fabrication of piezoelectric PZT thick film by sol-gel process", J. Ocean. Eng. Tech. 29 (2014) 94.

Q. Zhang, S. Corkovic, C. Shaw, Z. Huang and R.W. Whatmore, "Effect of porosity on the ferroelectrical properties of sol-gel prepared lead zirconate thin films", Thin Solid Films 488 (2005) 258. crossref(new window)

A.L. Khilkin, V.K. Yarmarkin, A. Wu, M. Avdeev, P.M. Vilarinbo and J. Baptista, "PZT-based piezoelectric composites via modified sol-gel route", J. Euro. Ceram. Soc. 21 (2001) 1535. crossref(new window)

R.A. Dorey and R.W. Whatmore, "Electrical properties of high density PZT and PMN-PT/PZT thick films produced using ComFi technology", J. Euro. Ceram. Soc. 24 (2004) 1091. crossref(new window)

R.A. Dorey, R.W. Whatmore, S.P. Beeby, R.N. Torah and N.M. White, "Screen printed PZT composite thick films", Inter. Ferroelec. 63 (2004) 89. crossref(new window)