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Thermal shock behaviors of TiN coatings on Inconel 617 and Silicon wafer substrates with finite element analysis method
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 Title & Authors
Thermal shock behaviors of TiN coatings on Inconel 617 and Silicon wafer substrates with finite element analysis method
Lee, Ki-Seuk; Jeon, Seol; Cho, Hyun; Lee, Heesoo;
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The degradation behaviors of TiN coating layers under thermo-mechanical stress were investigated in terms of comparison of finite element analysis (FEA) and experimental data. The coating specimen was designed to quarter cylinder model, and the pulsed laser ablation was assumed as heat flux condition. The FEA results showed that heat accumulation at the center of the laser-ablated spot occurred and principle stress was concentrated at the lower region of the coating layer. The microstructural observation revealed that surface melting and decrease of the coating thickness occurred in the TiN/Inconel 617 and the interfacial cracks formed in the TiN/Si. The delamination was caused by the mechanical stress from the center to the outside of the ablated spot as the FEA results expected. It was considered that the improvement of the thermal shock resistance was attributed to higher thermal conductivity of Si wafer than that of Inconel 617.
TiN coating;Thermal shock behavior;Finite element analysis;Thermal conductivity;
 Cited by
H. Cho and B.W. Lee, "High temperature properties of surface-modified hastelloy X alloy", J. Korean Cryst. Growth Cryst. Technol. 22 (2012) 183. crossref(new window)

W.D. Munz, "Titanium aluminum nitride films: a new alternative to TiN coatings", J. Vac. Sci. Technol. A 4 (1986) 2717. crossref(new window)

O. Knotek, W.D. Munz and T. Leyendecker, "Industrial deposition of binary, ternary, and quaternary nitrides of titanium, zirconium, and aluminum", J. Vac. Sci. Technol. A 5 (1987) 2173. crossref(new window)

A. Krella and A. Czyzniewski, "Influence of the substrate hardness on the cavitation erosion resistance of TiN coating", Wear 263 (2007) 395. crossref(new window)

T. Cselle and A. Barimani, "Today's applications and future developments of coatings for drills and rotating cutting tools", Surf. Coat. Technol. 76-77 (1995) 712. crossref(new window)

B. Navinsek, "Improvement of cutting tools by TiN PVD hard coating", Mater. Manuf. Process. 7 (1992) 363. crossref(new window)

M.T. Tilbrook, D.J. Paton, Z. Xie and M. Hoffman, "Microstructural effects on indentation failure mechanisms in TiN coatings: Finite element simulations", Acta Mater. 55 (2007) 2489. crossref(new window)

Y. Massiani, A. Medjahed, J.P. Crousier, P. Gravier and I. Rebatel, "Corrosion of sputtered titanium nitride films deposited on iron and stainless steel", Surf. Coat. Technol. 45 (1991) 115. crossref(new window)

S.V. Hainsworth and W.C. Soh, "The effect of the substrate on the mechanical properties of TiN coatings", Surf. Coat. Technol. 163 (2003) 515.

J.H. Huang, C.Y. Hsu, S.S. Chen and G.P. Yu, "Effect of substrate bias on the structure and properties of ionplated ZrN on Si and stainless steel substrates", Mater. Chem. Phys. 77 (2002) 14.

Y. Choi, S. Jeon, M.S. Jeon, H.G. Shon, H.H. Chun, Y.S. Lee and H. Lee, "Crack propagation behavior of TiN coatings by laser thermal shock experiments", Appl. Surf. Sci. 258 (2012) 8752. crossref(new window)

S. Jeon, J. Ha, Y. Choi, I. Jo and H. Lee, "Interfacial stability and diffusion barrier ability of $Ti_1 _xZr_xN$ coatings by pulsed laser thermal shock", Appl. Surf. Sci. 320 (2014) 602. crossref(new window)

S. Jeon, B. Kim, Y. Choi, I. Jo and H. Lee, "Thermal shock behaviors of $Ti_1 _xZr_xN$ coatings by accelerated test based on pulsed laser ablation", Ceram. Int. 42 (2016) 2241. crossref(new window)

S.L. Soo, D.K. Aspinwall and R.C. Dewes, "3D FE modelling of the cutting of Inconel 718", J. Mater. Process. Technol. 150 (2004) 116. crossref(new window)

E. Ceretti, M. Lucchi and T. Altan, "FEM simulation of orthogonal cutting: serrated chip formation", J. Mater. Process. Technol. 95 (1999) 17. crossref(new window)

K.D. Bouzakis, F. Klocke, G. Skordaris, E. Bouzakis, S. Gerardis, G. Katirtzoglou and S. Makrimallakis, "Influence of dry micro-blasting grain quality on wear behavior of TiAlN coated tools", Wear 271 (2011) 783. crossref(new window)

P. Peyre, I. Chaieb and C. Braham, "FEM calculation of residual stresses induced by laser shock processing in stainless steels", Model. Simul. Mater. Sci. Eng. 15 (2007) 205. crossref(new window)

J.H. Lee, C.D. Yoo and Y.S. Kim, "A laser-induced thermal spray printing process for phosphor layer deposition of PDP", J. Micromech. Microeng. 17 (2007) 258. crossref(new window)

S. Jeon, C.J. Van Tyne and H. Lee, "Degradation of TiAlN coatings by the accelerated life test using pulsed laser ablation", Ceram. Int. 40 (2014) 8677. crossref(new window)

S. Jeon, H. Lee, I. Jo, D. Shin and K.S. Lee, "Degradation of TiN coatings on Inconel 617 and silicon wafer substrates under pulsed laser ablation", J. Mater. Eng. Perform. 23 (2014) 1651. crossref(new window)

K. Ding and L. Ye, "FEM simulation of two sided laser shock peening of thin sections of Ti-6Al-4V alloy", Surf. Eng. 19 (2003) 127. crossref(new window)

N.A. Sakharova, J.V. Fernandes, M.C. Oliveira and J.M. Antunes, "Influence of ductile interlayers on mechanical behavior of hard coatings under depth-sensing indentation: a numerical study on TiAlN", J. Mater. Sci. 45 (2010) 3812. crossref(new window)

D. Stone, K. Yoder and W. Sproul, "Hardness and elastic modulus of TiN based on continuous indentation technique and new correlation", J. Vac. Sci. Technol. A 9 (1991) 2543. crossref(new window)

N.K. Seo, S. Jeon, Y. Choi, M.S. Jeon, H.G. Shin and H. Lee, "Interfacial characteristics of TiN coatings on SUS304 and silicon wafer substrates with pulsed laser thermal shock", Korean J. Met. Mater. 52 (2014) 81. crossref(new window)

Q. Lu, S.S. Mao, X. Mao and R.E. Russo, "Delayed phase explosion during high-power nanosecond laser ablation of silicon", Appl. Phys. Lett. 80 (2002) 3072. crossref(new window)

J. Haider, M. Rahman, B. Corcoran and M.S.J. Hashmi, "Simulation of thermal stress in magnetron sputtered thin coating by finite element analysis", J. Mater. Process. Technol. 168 (2005) 36. crossref(new window)

H. Oettel and R. Wiedemann, "Residual stresses in PVD hard coatings", Surf. Coat. Technol. 76-77 (1995) 265. crossref(new window)

M. Bielawski, "Residual stress control in TiN/Si coatings deposited by unbalanced magnetron sputtering", Surf. Coat. Technol. 200 (2006) 3987. crossref(new window)

C. Kirchlechner, K.J. Martinschitz, R. Daniel, M. Klaus, C. Genzel, C. Mitterer and J. Keckes, "Residual stresses and thermal fatigue in CrN hard coatings characterized by high-temperature synchrotron X-ray diffraction", Thin Solid Films 518 (2010) 2090. crossref(new window)