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Development of Internal Laser Scribing System for Cutting of Sapphire Wafer in LED Chip Fabrication Processes
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 Title & Authors
Development of Internal Laser Scribing System for Cutting of Sapphire Wafer in LED Chip Fabrication Processes
Kim, Jong-Su; Ryu, Byung-So; Kim, Ki-Beom; Song, Ki-Hyeok; Kim, Byung-Chan; Cho, Myeong-Woo;
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LED has added value as a lighting source in the illuminating industry because of its high efficiency and low power consumption. In LED production processes, the chip cutting process, which mainly uses a scribing process with a laser has an effect on quality and productivity of LED. This scribing process causes problems like heat deformation, decreasing strength. The inner laser method, which makes a void in wafer and induces self-cracking, can overcome these problems. In this paper, cutting sapphire wafer for fabricating LED chip using the inner laser scribing process is proposed and evaluated. The aim is to settle basic experiment conditions, determine parameters of cutting, and analyze the characteristics of cutting by means of experimentation.
Internal Laser Scribing;Laser Ablation;LED Chip;Pulse Laser;Sapphire Wafer;
 Cited by
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