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Moisture Gettering by Porous Alumina Films on Textured Silicon Wafer
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  • Journal title : Korean Chemical Engineering Research
  • Volume 53, Issue 3,  2015, pp.401-406
  • Publisher : The Korean Institute of Chemical Engineers
  • DOI : 10.9713/kcer.2015.53.3.401
 Title & Authors
Moisture Gettering by Porous Alumina Films on Textured Silicon Wafer
Lim, Hyo Ryoung; Eom, Nu Si A; Cho, Jeong-Ho; Choa, Yong-Ho;
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Getter is a class of materials used in absorbing gases such as hydrogen and moisture in microelectronics or semiconductor devices to operate properly. In this study, we developed a new device structure consisting of porous anodized alumina films on textured silicon wafer, which have cost efficiency in materials and processing aspects. Anodic aluminum oxide (AAO) with controlled pore sizes can be applied to a high-efficiency moisture absorber due to the high surface area and OH- saturated surface property. The moisture sorption capacity was 2.02% (RH
Getter;Moisture Adsorption;Solution Process;Anodizing;Anodic Aluminum Oxide;
 Cited by
Lorenz, H. P., Vaccum Technology, In Ullmann's Encyclopedia of Industrial Chemistry, Wiley-VCH Verlag GmbH & Co. KGaA, Weinheim(2000).

Previti, M. and Gilleo, K., "Getters: Micromolecular Scavengers for Packaging," Proceedings of International Symposium on Advanced Packaging Materials: Processes, Properties and Interfaces, March, Georgia(2001).

Niklaus, F., Vieider, C. and Jakobsen, H., "MEMS-based Uncooled Infrared Bolometer Arrays: A Review," Proceedings of MEMS/MOEMS Technologies and Applications III, November, Beijing (2007).


Ramesham, R. and Kullberg, R. C., "Review of Vacuum Packaging and Maintenance of MEMS and the Use of Getters Therein," J. Micro-Nanolithogr. MEMS MOEMS, 8(3), 031307(2009). crossref(new window)

Chuntonov, K. A. and Yatsenko, S. P., "Getter Films for Small Vacuum Chambers," Recent Patents on Materials Science, 6(1), 29-39(2013).

Lee, W. and Park, S.-J., "Porous Anodic Aluminum Oxide: Anodization and Templated Synthesis of Functional Nanostructures," Chem. Rev., 114(15), 7487-7556(2014). crossref(new window)

Ono, S., Ichinose, H. and Masuko, N., "The High Resolution Observation of Porous Anodic Films Formed on Aluminum in Phosphoric Acid Solution," Corrosion Sci., 33(6), 841-850(1992). crossref(new window)

Yao, L., Zheng, M., Li, H., Ma, L. and Shen, W., "High-performance Humidity Sensors Based on High-field Anodized Porous Alumina Films," Nanotechnology., 20(39), 395501(2009). crossref(new window)

Hideki, M. and Masahiro, S., "Fabrication of Gold Nanodot Array Using Anodic Porous Alumina as an Evaporation Mask," Jpn. J. Appl. Phys., 35(1B), L126-L129(1996). crossref(new window)

Hwang, S.-K., Jeong, S.-H., Hwang, H.-Y., Lee, O.-J. and Lee, K.-H., "Fabrication of Highly Ordered Pore Array in Anodic Aluminum Oxide," Korean J. Chem. Eng., 19(3), 467-473(2002). crossref(new window)

Sanz, O., Echave, F. J., Odriozola, J. A. and Montes, M., "Aluminum Anodization in Oxalic Acid: Controlling the Texture of $Al_2O_3$/Al Monoliths for Catalytic Aplications," Ind. Eng. Chem. Res., 50(4), 2117-2125(2011). crossref(new window)

Crouse, D., Lo, Y.-H., Miller, A. and Crouse, M., "Self-ordered Pore Structure of Anodized Aluminum on Silicon and Pattern Transfer," Appl. Phys. Lett., 76(1), 49-51(2000). crossref(new window)

Rabin, O., Herz, P. R., Lin, Y. M., Akinwande, A. I., Cronin, S. B. and Dresselhaus, M. S., "Formation of Thick Porous Anodic Alumina Films and Nanowire Arrays on Silicon Wafers and Glass," Adv. Funct. Mater., 13(8), 631-638(2003). crossref(new window)

Yang, Y., Chen, H., Mei, Y., Chen, J., Wu, X. and Bao, X., "Anodic Alumina Template on Au/Si Substrate and Preparation of CdS Nanowires," Solid State Commun., 123(6), 279-282(2002). crossref(new window)

Myung, N. V., Lim, J., Fleurial, J.-P., Yun, M., West, W. and Choi, D., "Alumina Nanotemplate Fabrication on Silicon Substrate," Nanotechnology, 15(7), 833(2004). crossref(new window)

Henry, M. S. and James R. S., "Hydrogen and Moisture Getter and Absorber for Sealed Devices," U.S. Patent No. 5,888,925(1999).