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Moisture Gettering by Porous Alumina Films on Textured Silicon Wafer
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  • Journal title : Korean Chemical Engineering Research
  • Volume 53, Issue 3,  2015, pp.401-406
  • Publisher : The Korean Institute of Chemical Engineers
  • DOI : 10.9713/kcer.2015.53.3.401
 Title & Authors
Moisture Gettering by Porous Alumina Films on Textured Silicon Wafer
Lim, Hyo Ryoung; Eom, Nu Si A; Cho, Jeong-Ho; Choa, Yong-Ho;
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 Abstract
Getter is a class of materials used in absorbing gases such as hydrogen and moisture in microelectronics or semiconductor devices to operate properly. In this study, we developed a new device structure consisting of porous anodized alumina films on textured silicon wafer, which have cost efficiency in materials and processing aspects. Anodic aluminum oxide (AAO) with controlled pore sizes can be applied to a high-efficiency moisture absorber due to the high surface area and OH- saturated surface property. The moisture sorption capacity was 2.02% (RH
 Keywords
Getter;Moisture Adsorption;Solution Process;Anodizing;Anodic Aluminum Oxide;
 Language
Korean
 Cited by
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