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Fabrication of piezoelectric PZT thick film by aerosol deposition method
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 Title & Authors
Fabrication of piezoelectric PZT thick film by aerosol deposition method
Kim, Ki-Hoon; Bang, Kook-Soo; Park, Chan;
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 Abstract
Lead zirconate titanate (PZT) thick films with a thickness of were fabricated on silicone substrates using an aerosol deposition method. The starting powder, which had diameters of , was observed using SEM. The average diameter () was . An XRD analysis showed a typical perovskite structure, a mixture of the tetragonal phase and rhombohedral phase. The as-deposited film with nano-sized grains had a fairly dense microstructure without any cracks. The deposited film showed a mixture of an amorphous phase and a very fine crystalline phase by diffraction pattern analysis using TEM. The as-deposited films on silicon were annealed at a temperature of . A 20- thick PZT film was torn out as a result of the high compressive stress between the PZT film and substrate.
 Keywords
PZT powder;Aerosol deposition method;FE-SEM;Thick film;Ceramics;TEM;
 Language
Korean
 Cited by
1.
Sol-Gel 법에 의한 압전 PZT 후막의 제조,박종환;방국수;박찬;

한국해양공학회지, 2015. vol.29. 1, pp.94-99 crossref(new window)
2.
에어로졸 증착법에 의한 압전 PZT 후막의 전기적 특성,김기훈;방국수;박동수;박찬;

한국결정성장학회지, 2015. vol.25. 6, pp.239-244 crossref(new window)
1.
Electrical properties of piezoelectric PZT thick film by aerosol deposition method, Journal of the Korean Crystal Growth and Crystal Technology, 2015, 25, 6, 239  crossref(new windwow)
2.
Fabrication of Piezoelectric PZT Thick Film by Sol-gel Process, Journal of Ocean Engineering and Technology, 2015, 29, 1, 94  crossref(new windwow)
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