Fabrication of piezoelectric PZT thick film by aerosol deposition method Kim, Ki-Hoon; Bang, Kook-Soo; Park, Chan;
Lead zirconate titanate (PZT) thick films with a thickness of were fabricated on silicone substrates using an aerosol deposition method. The starting powder, which had diameters of , was observed using SEM. The average diameter () was . An XRD analysis showed a typical perovskite structure, a mixture of the tetragonal phase and rhombohedral phase. The as-deposited film with nano-sized grains had a fairly dense microstructure without any cracks. The deposited film showed a mixture of an amorphous phase and a very fine crystalline phase by diffraction pattern analysis using TEM. The as-deposited films on silicon were annealed at a temperature of . A 20- thick PZT film was torn out as a result of the high compressive stress between the PZT film and substrate.
Electrical properties of piezoelectric PZT thick film by aerosol deposition method, Journal of the Korean Crystal Growth and Crystal Technology, 2015, 25, 6, 239
Fabrication of Piezoelectric PZT Thick Film by Sol-gel Process, Journal of Ocean Engineering and Technology, 2015, 29, 1, 94
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