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Fabrication of Piezoelectric PZT Thick Film by Sol-gel Process
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 Title & Authors
Fabrication of Piezoelectric PZT Thick Film by Sol-gel Process
Park, Jong-whan; Bang, Kook-soo; Park, Chan;
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 Abstract
Lead zirconate titanate (PZT) thick films with thicknesses of ㎛ were fabricated on silicon substrates using an aerosol deposition method. A PZT powder solution was prepared using a sol-gel process. The average diameters (d50) obtained were 1.67, 1.98, and 2.40μm when the pyrolysis temperatures were 300℃, 350℃, and 450℃ respectively. The as-deposited film had a uniform microstructure without any cracks or pores. The as-deposited films on silicon were annealed at a temperature of 700℃. The 20-㎛-thick PZT film showed good adherence between the PZT film and substrate, with no tearing observed in the conventional solid phase process. This was probably because the presence of pores produced from organic residue during annealing relieved the residual stresses in the deposited film.
 Keywords
PZT powder;Sol-gel process;Aerosol deposition method;FE-SEM;Thick film;TEM;
 Language
Korean
 Cited by
1.
에어로졸 증착법에 의한 압전 PZT 후막의 전기적 특성,김기훈;방국수;박동수;박찬;

한국결정성장학회지, 2015. vol.25. 6, pp.239-244 crossref(new window)
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