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Effect of Substrate Temperature on the Optical and Electrical Properties of ITO Thin Films deposited on Nb2O5/SiO2 Buffer Layer
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 Title & Authors
Effect of Substrate Temperature on the Optical and Electrical Properties of ITO Thin Films deposited on Nb2O5/SiO2 Buffer Layer
Joung, Yang-Hee; Kang, Seong-Jun;
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In this study, we prepared ITO thin films on double buffer layer using DC magnetron sputtering method and investigated electrical and optical properties with various substrate temperatures (room temperature ~ ). The resistivity showed a decreasing tendency, because crystallinity has been improved due to the enlarged grain size with increasing substrate temperature. ITO thin film deposited at showed the most excellent value of resistivity and sheet resistance as , , respectively. In results of optical properties, average transmittance was increased but chromaticity () was decreased in visible light region (400~800nm) with increasing substrate temperature. Average transmittance and chromaticity () of ITO thin film deposited at exhibited significantly improved results as 85.8% and 2.13 compared to 82.8% and 4.56 of the ITO thin film without buffer layer. Finally, we found that ITO thin film introduced double buffer layer has a remarkably improved optical property such as transmittance and chromaticity due to the index matching effect.
ITO thin film; buffer layer;Sheet resistance;Transmittance;Chromaticity;Index matching;
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X. Zhou, J. Xu, L. Yang, G. Zhu and Z. Yu, "Effects of Tin Content on Structure, Properties Electrical Repeatability, Uniformity and Stability of High Sheet Resistance ITO Thin Films for Touch Panels," J. Mater. Sci.: Mater. Electron, vol. 26, pp. 6954-6960, Jun. 2015. crossref(new window)

S. Y. Park, M. J. Kim and P. K. Song, "Effects of the Cathode Magnetic Field Strength on the Properties of Sputtered Ultrathin ITO Films," Journal of Ceramic Processing Research, vol. 16, pp. 267-271, Apr. 2015.

H. Hosono, H. Ohta, M. Orita, K. Ueda and M. Hirano, "Frontier of transparent conductive oxide thin films," Vacuum, vol. 66, pp. 419-425, Aug. 2002. crossref(new window)

R. N. Aguilar and G. C. M. Meijer, "Fast Interface Electronics for a Resistive Touch Screen," in Proc. IEEE Sensors, vol. 2, pp.1360-1363, Jun. 2002. crossref(new window)

W. P. Eaton and J. H. Smith, "Micromachined Pressure Sensors: Review and Recent Developments," Smart Mater. Struct., vol. 6, pp. 530-539, Oct. 1997. crossref(new window)

T. H. Hwang, W. H. Cui, I. S. Yang, and O. K. Kwon, "A Highly Area-Efficient Controller for Capacitive Touch Screen Panel Systems," IEEE Trans. Consum. Electron., vol. 56, pp. 1115-1122, May. 2010. crossref(new window)

S. P. Hotelling and B. R. Land, "Double-Sided Touch-Sensitive Panel with Shield and Drive Combined Layer," U.S. Patent 11/650, 182. Jul. 3, 2008.

S. K. Kim, W. Choi, W. J. Rim, Y. T. Chun, H. S. Shim, H. J. Kwon, J. S. Kim, I. S. Kee, S. C. Kim, S. Y. Lee, and J. S. Park, "A Highly Sensitive Capacitive Touch Sensor Integrated on a Thin-Film-Encapsulated Active-Matrix OLED for Ultrathin Displays," IEEE Trans. Electron. Dev., vol. 58, pp. 3609-3615, Oct. 2011. crossref(new window)

X. Yan, F. W. Mont, D. J. Poxson, M. F. Schubert, J. K. Kim, J. H. Cho, and E. F. d Schubert, "Refractive-Index-Matched Indium-Tin-Oxide Electrodes for Liquid Crystal Displays," Jpn. J. Appl. Phys., vol. 48, pp. 120203, Dec. 2009. crossref(new window)

C. H. Hong, J. H. Shin, B. K. Ju, K. H. Kim, N. M. Park, B. S. Kim, and W. S. Cheong, "Index-Matched Indium Tin Oxide Electrodes for Capacitive Touch Screen Panel Applications," J. Nanosci. Nanotechnol., vol. 13, pp. 7756-7759, Nov. 2013. crossref(new window)

M. Y. Park, B. G. Kang, J. S. Kim, H. Y. Kim, H. S. Kim, W. T. Lim, and S. Y. Choi, "Chromaticity(b*), Sheet Resistance and Transmittance of $SiO_2$-ITO Thin Films Deposited on PET Film by Using Roll-to-Roll Sputter System," Kor. J. Mater. Res., vol. 21, pp. 255-262, May. 2011. crossref(new window)

G. Haacke, "New Figure of merit for Transparent Conductors," J. Appl. Phys., vol. 32, pp. 4086-4089, Oct. 1976.