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Carbon Dioxide Sensor Substrate for Surface-mounted Packaging
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 Title & Authors
Carbon Dioxide Sensor Substrate for Surface-mounted Packaging
Han, Hyeuk-Jin; Kim, Tae Wan; Park, Kwang-Min; Park, Chong-Ook;
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Solid state electrochemical and chemo-resistive gas sensors have been used widely but can operate only under high temperature. For reducing the power consumption and optimizing the structure of the substrate of these sensors, we conducted device and circuit simulations using the COMSOL Multiphysics simulator. For assessing the effective types of substrate and heat isolation, we conducted three-dimensional thermal simulations in two separate parts; (a) by changing the shape of the contacting holes and (b) punching additional holes on the substrate. Thus, it was possible to achieve high temperature in the sensor end of the substrate while maintaining low power consumption, and temperature in the circuit.
Simulation;Sensor substrate;Heat transfer effect;
 Cited by
Comparison of the Power Consumption between the Ceramic and Wire Bonding Packaging Methods for Solid State Electrochemical Carbon dioxide Sensors, Journal of Sensor Science and Technology, 2016, 25, 3, 173  crossref(new windwow)
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C. O. Park and S. A. Akbar, "Chemical sensors for pollution monitoring and control", Journal of Materials Science, 38 (2003) 4237. crossref(new window)

G.S. Chung and J.M. Jeong, "Fabrication of micro heaters on polycrystalline 3C-SiC suspended membranes for gas sensors and their characteristics", Microelectronic Engineering, Vol. 87, pp.2348-2352, 2010. crossref(new window)

C.O Park, S.A Akbar, and J Hwang, "Selective gas detection with catalytic filter", Materials Chemistry and Physics, Vol. 75, pp. 56-60, 2002. crossref(new window)