Fabrication and Vibration Characterization of a Partially Etched-type Artificial Basilar Membrane Kang, Hanmi; Jung, Youngdo; Kwak, Jun-Hyuk; Song, Kyungjun; Kong, Seong Ho; Hur, Shin;
The structure of the human ear is divided into the outer ear, the middle ear, and the inner ear. The inner ear includes the cochlea that plays a very important role in hearing. Recently, the development of an artificial cochlear device for the hearing impaired with cochlear damage has been actively researched. Research has been carried out on the biomimetic piezoelectric thin film ABM (Artificial Basilar Membrane) in particular. In an effort to improve the frequency separation performance of the existing piezoelectric thin film ABM, this paper presents the design, fabrication, and characterization of the production and performance of a partially etched-type ABM material. plasma etching equipment was used to partially etch a piezoelectric thin film ABM to make it more flexible. The mechanical-behavior characterization of the manufactured partially etched-type ABM showed that the overall separation frequency range shifted to a lower frequency range more suitable for audible frequency bandwidths and it displayed an improved frequency separation performance. In addition, the maximum magnitude of the vibration displacement at the first local resonant frequency was enhanced by three times from 38 nm to 112 nm. It is expected that the newly designed, partially etched-type ABM will improve the issue of cross-talk between nearby electrodes and that the manufactured partially etched-type ABM will be utilized for next-generation ABM research.
B. Wen, "Modeling the nonlinear active cochlea", Diss. University of Pennsylvania, 2006.
G. Zweig, R. Lipes, and JR. Pierce, "The cochlear compromise", J. the Acoustical Society of America, Vol. 59, No. 4, pp. 975-982, 1976.
E. de Boer, "Auditory physics. Physical principles in hearing theory. I", Physics reports, Vol. 62, No. 2, pp. 87-174, 1980.
G. von Bekesy, "Some biophysical experiments from fifty years ago", Annual review of physiology, Vol. 36, No. 1, pp. 1-18, 1974.
T. Inaoka, H. Shintaku, T. Nakagawa, S. Kawano, H. Ogita, T. Sakamoto and J. Ito, "Piezoelectric materials mimic the function of the cochlear sensory epithelium", Proceedings of the National Academy of Sci., Vol. 108, No. 45, pp. 18390-18395, 2011.
B. S. Wilson, and M. F. Dorman, "Cochlear implants: a remarkable past and a brilliant future", Hearing research, Vol. 242, No. 1, pp. 3-21, 2008.
B. S. Wilson, and M. F. Dorman, "Cochlear implants: current designs and future possibilities", J Rehabil Res Dev., Vol. 45, No. 5, pp. 695-730, 2008.
F. G. Zeng, S. Rebscher, W. Harrison, X. Sun, and H. Feng, "Cochlear implants: system design, integration, and evaluation", Biomedical Engineering, IEEE Reviews in, Vol. 1, pp. 115-142, 2008.
R. D. White, and K. Grosh, "Design and characterization of a MEMS piezoresistive cochlear-like acoustic sensor", ASME 2002 International Mechanical Engineering Congress and Exposition. American Society of Mechanical Engineers, pp. 201-210, 2002.
R. D. White, and K. Grosh, "Microengineered hydromechanical cochlear model", Proceedings of the National Academy of Sci. of the United States of America, Vol. 102, No. 5, pp. 1296-1301, 2005.
Y. Jung, S. Kim, J. Kwak, H. Kang, Y.H. Lee, S. Park, and S. Hur, "Development and characterization of piezoelectric artificial cochlear with micro actuator mimicking human cochlear", J. of Physics: Conf. Series, IOP Publishing, Vol. 476, No. 1, pp. 012015, 2013.
Y. Jung, J. Kwak, H. Kang, W. D, Kim, and S. Hur, "Mechanical and Electrical Characterization of Piezoelectric Artificial Cochlear Device and Biocompatible Packaging", Sensors, Vol. 15, No. 8, pp. 18851-18864, 2015.