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Fabrication and Characteristics of X-ray Position Detection Sensor
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  • Journal title : Journal of IKEEE
  • Volume 19, Issue 4,  2015, pp.535-540
  • Publisher : Institude of Korean Electrical and Electronics Engineers
  • DOI : 10.7471/ikeee.2015.19.4.535
 Title & Authors
Fabrication and Characteristics of X-ray Position Detection Sensor
Park, Hyung-Jun; Kim, In-Su;
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 Abstract
A microstrip gas chamber (MSGC), applied to digital radiography system, was designed and constructed. The microstrip electrodes were fabricated with Chrome(Cr.). by photolithography process on Silicon(Si) wafer and glass substrate. The width of anode and cathode electrodes was , and , respectively. The distance of the electrodes was , and the active area was . And the number of anode was 80. The microstrip electrodes were damaged when discharges occurred over the 600 V of anode voltage. As the result of experiments. It detected the typical output signals of the pulse width, 20 ns, under the condition that the detecting gas was Ar(90%) + (10%), X-ray tube voltage was 42 kV, and tube current was 1 mA.
 Keywords
MSGC;Microstrip electrode;X-ray Position Detection;Digital Radiography System;Photolithography process;Sensor technology;
 Language
Korean
 Cited by
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