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Annealing Effect on controlling Self-Organized Ag/Ti Nanoparticles on 4H-SiC Substrate
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  • Journal title : Journal of IKEEE
  • Volume 20, Issue 2,  2016, pp.177-180
  • Publisher : Institude of Korean Electrical and Electronics Engineers
  • DOI : 10.7471/ikeee.2016.20.2.177
 Title & Authors
Annealing Effect on controlling Self-Organized Ag/Ti Nanoparticles on 4H-SiC Substrate
Kim, So-Mang; OH, Jong-Min; Koo, Sang-Mo;
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The effect of varying thickness of Ag/Ti metal bilayer and annealing time have investigated for controlling self-organized nanoparticles (NPs) on 4H-SiC substrate. In addition, Glass and Si substrate which have different surface energy from SiC were fabricated for analyzing interaction of agglomeration. The results of FE-SEM indicated the different formation behaviors of NPs in various ranges of fabrication condition. The surface energy was measured by using a Contact Angle Analyzer. The formation of network-like NPs was observed on Glass and 4H-SiC, respectively, whereas it was not the case on Si substrates. It has been found that the size of NPs increases with decreasing surface energy, due to particle size-dependent hydrophilic properties of substrates. The different formation behavior was explained by using Young`s equation for the contact angles between the metal and different substrates.
4H-SiC;self-organization;nanoparticles;surface energy;metal annealing;contact angle;
 Cited by
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