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Synthesis and Characterization of a Pt/NiO/Pt Heterostructure for Resistance Random Access Memory
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  • Journal title : Applied Microscopy
  • Volume 42, Issue 4,  2012, pp.207-211
  • Publisher : Korean Society of Electron Microscopy
  • DOI : 10.9729/AM.2012.42.4.207
 Title & Authors
Synthesis and Characterization of a Pt/NiO/Pt Heterostructure for Resistance Random Access Memory
Kim, Hyung-Kyu; Bae, Jee-Hwan; Kim, Tae-Hoon; Song, Kwan-Woo; Yang, Cheol-Woong;
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 Abstract
We examined the electrical properties and microstructure of NiO produced using a sol-gel method and Ni nitrate hexahydrate () to investigate if this NiO thin film can be used as an insulator layer for resistance random access memory (ReRAM) devices. It was found that as-prepared NiO film was polycrystalline and presented as the nonstoichiometric compound with Ni interstitials (oxygen vacancies). Resistances-witching behavior was observed in the range of 0~2 V, and the low-resistance state and high-resistance state were clearly distinguishable ( orders). It was also demonstrated that NiO could be patterned directly by KrF eximer laser irradiation using a shadow mask. NiO thin film fabricated by the sol-gel method does not require any photoresist or vacuum processes, and therefore has potential for application as an insulating layer in low-cost ReRAM devices.
 Keywords
Resistance-switching;Resistance random access memory;NiO;Laser decomposition;Sol-gel method;
 Language
English
 Cited by
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