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Electrical Characterization of Electronic Materials Using FIB-assisted Nanomanipulators
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  • Journal title : Applied Microscopy
  • Volume 42, Issue 4,  2012, pp.223-227
  • Publisher : Korean Society of Electron Microscopy
  • DOI : 10.9729/AM.2012.42.4.223
 Title & Authors
Electrical Characterization of Electronic Materials Using FIB-assisted Nanomanipulators
Roh, Jae-Hong; You, Yil-Hwan; Ahn, Jae-Pyeong; Hwang, Jinha;
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 Abstract
Focused Ion Beam (FIB) systems have incorporated versatile nanomanipulators with inherent sophisticated machining capability to characterize the electrical properties of highly miniature components of electronic devices. Carbon fibers were chosen as a model system to test the applicability of nanomanipulators to microscale electronic materials, with special emphasis on the direct current current-voltage characterizations in terms of electrode configuration. The presence of contact resistance affects the electrical characterization. This resistance originates from either i) the so-called "spreading resistance" due to the geometrical constriction near the electrode - material interface or ii) resistive surface layers. An appropriate electrode strategy is proposed herein for the use of FIB-based manipulators.
 Keywords
Focused ion beam;Nanomanipulators;Spreading resistance;Electrode configuration;
 Language
English
 Cited by
1.
Advanced Methodologies for Manipulating Nanoscale Features in Focused Ion Beam,;;;;

Applied Microscopy, 2015. vol.45. 4, pp.208-213 crossref(new window)
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