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Focused Ion Beam-Based Specimen Preparation for Atom Probe Tomography
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  • Journal title : Applied Microscopy
  • Volume 46, Issue 1,  2016, pp.14-19
  • Publisher : Korean Society of Electron Microscopy
  • DOI : 10.9729/AM.2016.46.1.14
 Title & Authors
Focused Ion Beam-Based Specimen Preparation for Atom Probe Tomography
Lee, Ji Yeong; Ahn, Jae-Pyoung;
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Currently, focused ion beams (FIB) are widely used for specimen preparation in atom probe tomography (APT), which is a three-dimensional and atomic-scale compositional analysis tool. Specimen preparation, in which a specific region of interest is identified and a sharp needle shape created, is the first step towards successful APT analysis. The FIB technique is a powerful tool for site-specific specimen preparation because it provides a lift-out technique and a controllable manipulation function. In this paper, we demonstrate a general procedure containing the crucial points of FIB-based specimen preparation. We introduce aluminum holders with moveable pin and an axial rotation manipulator for specimen handling, which are useful for flipping and rotating the specimen to present the backside and the perpendicular direction. We also describe specimen preparation methods for nanowires and nanopowders, using a pick-up method and an embedding method by epoxy resin, respectively.
Atom probe;Focused ion beams;Specimen preparation;Lift-out technique;
 Cited by
Atom-by-Atom Analysis of Semiconductor Nanowires with Parts Per Million Sensitivity, Nano Letters, 2017, 17, 2, 599  crossref(new windwow)
Allen J E, Hemesath E R, Perea D E, Lensch-Falk J L, Li Z Y, Yin F, Gass M H, Wang P, Bleloch A L, Palmer R E, and Lauhon L J (2008) Highresolution detection of Au catalyst atoms in Si nanowires. Nat. Nanotechnology 3, 168-173. crossref(new window)

Blumtritt H, Isheim D, Senz S, Seidman D N, and Moutannabbir O (2014) Preparation of nanowire specimens for laser-assisted atom probe tomography. Nanotechnology 25, 435704-1-7. crossref(new window)

Bunton J H, Olson J D, Lenz D R, and Kelly T F (2007) Advances in pulsedlaser atom probe: instrument and specimen design for optimum performance. Mirosc. Microanal. 13, 418-427. crossref(new window)

Eichfeld C M, Gerstl S S A, Prosa T, Ke Y, Redwing J M, and Mohney S E (2012) Local electrode atom probe analysis of silicon nanowires grown with an aluminum catalyst. Nanotechnology 23, 215205-1-6. crossref(new window)

Felfer P, Li T, Eder K, Galinski H, Magyar A P, Bell D C, Smith G D W, Kruse N, Ringer S P, and Cairney J M (2015) New approaches to nanoparticle sample fabrication for atom probe tomography. Ultramicroscopy 159, 413-419. crossref(new window)

Felfer P J, Alam T, Ringer S P, and Cairney J M (2012) A reproducible method for damage-free site-specifi c preparation of atom probe tips from interfaces. Micro. Res. Tech. 75, 484-491. crossref(new window)

Gault B, Moody M P, Cairney J M, and Ringer S P (2012) Atom Probe Microscopy, p. 87, (Springer-Verlag New York, New York).

Kato N I (2004) Reducing focused ion beam damage to transmission electron microscopy samples. J. Elect. Micros. 53, 451-458. crossref(new window)

Kelly T F, Bribb T T, Olson J D, Martens R L, and Shepard J D (2004) First data from a commercial local electrode atom probe (LEAP). Microsc. Microanal. 10, 378-383. crossref(new window)

Kelly T F and Larson D J (2012) Atom probe tomography. Annu. Rev. Mater. Res. 42, 1-31. crossref(new window)

Larson D J, Giddings A D, Wu Y, Verheijen M A, Prosa T J, Roozeboom F, Rice K P, Kessels W M M, Geiser B P, and Kelly T F (2015) Encapsulation method for atom probe tomography analysis of nanoparticles. Ultramicroscopy 159, 420-426. crossref(new window)

Larson D J, Prosa Ty J, Ulfi g R M, Geiser B P, and Kelly T F (2013) Local Electrode Atom Probe Tomography (Springer-Verlag New York, New York). p. 30.

Lauhon L J (2009) Direct measurement of dopant distribution in an individual vapour-liquid-solid nanowire. Nat. Nanotechnol. 4, 315-319. crossref(new window)

Perea D E, Allen J E, May S J, Wessels B W, Seidman D N, and Lauhon L J (2006) Three-dimensional nanoscale composition mapping of semiconductor nanowires. Nano Lett. 6, 181-185. crossref(new window)

Thompson K, Lawrence D, Larson D J, Olson J D, Kelly T F, and Gorman B (2007) In situ site-specific specimen preparation for atom probe tomography. Ultramicroscopy 107, 131-139. crossref(new window)